金属有機化合物分解法による酸化物半導体薄膜の成長
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- Material Type
- 記事
- Author/Editor
- 西本尚己
- Publication, Distribution, etc.
- Publication Date
- 2021-03
- Publication Date (W3CDTF)
- 2021-03
- Alternative Title
- Growth of oxide semiconductor thin films by metal-organic decomposition
- Periodical title
- 島根県産業技術センター研究報告
- No. or year of volume/issue
- (57)
- Volume
- (57)