エピタキシャルAl₂O₃/Si構造の耐放射線性に関する研究
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- Material Type
- 記事
- Author/Editor
- 葉山清輝岩村義明高倉健一郎
- Publication, Distribution, etc.
- Publication Date
- 2008-12
- Publication Date (W3CDTF)
- 2008-12
- Alternative Title
- Radiation damage in epitaxial Al₂O₃ films on Si by high energy particles irradiation
- Periodical title
- 熊本電波工業高等専門学校研究紀要
- No. or year of volume/issue
- (35)
- Volume
- (35)