Jump to main content

博士論文

Water vapor in DC reactive magnetron sputtering plasma : characteristics and applications

Icons representing 博士論文
The cover of this title could differ from library to library. Link to Help Page

Available in National Diet Library

Find on the publisher's website

国立国会図書館デジタルコレクション

Digital data available

Check on the publisher's website

DOI[10.14988/0002000098]to the data of the same series

Water vapor in DC reactive magnetron sputtering plasma : characteristics and applications

Persistent ID (NDL)
info:ndljp/pid/13731126
Material type
博士論文
Author
Catapang, Allen Vincent Barabona
Publisher
-
Publication date
2023-09-20
Material Format
Digital
Capacity, size, etc.
-
Name of awarding university/degree
同志社大学,博士(工学),Doctor of Philosophy in Engineering
View All

Notes on use at the National Diet Library

本資料は、掲載誌(URI)等のリンク先にある学位授与機関のWebサイトやCiNii DissertationsLeave the NDL website. から、本文を自由に閲覧できる場合があります。

Notes on use

Note (General)：

application/pdf

Detailed bibliographic record

Summary, etc.：

DC反応性マグネトロンスパッタリングにおける水蒸気プラズマを用いた酸化亜鉛薄膜の成膜について、薄膜成膜とプラズマソースでの検討を行いました。DCマグネトロンスパッタリングプラズマの特性は、ターゲット表面、基板蒸着領域、バルクプラズマの3つの重要な領域で詳細に調査しました。プラズマソースからの制御され...

Search by Bookstore

Search by Bookstore

Read this material in an accessible format.

View materials in accessible formats for people with print disabilities (1Type)

Holdings of Libraries in Japan

This page shows libraries in Japan other than the National Diet Library that hold the material.

List of Cooperating Institutions and Databases

Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.

other

  • Doshisha University Academic Repository

    Digital
    You can check the holdings of institutions and databases with which Institutional Repositories DataBase(IRDB)(Institutional Repository) is linked at the site of Institutional Repositories DataBase(IRDB)(Institutional Repository).
    Doshisha University Academic Repository

Search by Bookstore

Read in Disability Resources

Bibliographic Record

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Digital

Material Type
博士論文
Title
Water vapor in DC reactive magnetron sputtering plasma : characteristics and applications
Author/Editor
Catapang, Allen Vincent Barabona
Author Heading
Catapang, Allen Vincent Barabona
Publication Date
2023-09-20
Publication Date (W3CDTF)
2023-09-20
Alternative Title
反応性マグネトロンスパッタリングプラズマ中の水蒸気 : 特徴と応用
ハンノウセイ マグネトロン スパッタリング プラズマチュウ ノ スイジョウキ : トクチョウ ト オウヨウ
Degree grantor/type
同志社大学
Date Granted
2023-09-20
Date Granted (W3CDTF)
2023-09-20