博士論文

Water vapor in DC reactive magnetron sputtering plasma : characteristics and applications

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DOI[10.14988/0002000098]to the data of the same series

Water vapor in DC reactive magnetron sputtering plasma : characteristics and applications

Persistent ID (NDL)
info:ndljp/pid/13731126
Material type
博士論文
Author
Catapang, Allen Vincent Barabona
Publisher
-
Publication date
2023-09-20
Material Format
Digital
Capacity, size, etc.
-
Name of awarding university/degree
同志社大学,博士(工学),Doctor of Philosophy in Engineering
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DC反応性マグネトロンスパッタリングにおける水蒸気プラズマを用いた酸化亜鉛薄膜の成膜について、薄膜成膜とプラズマソースでの検討を行いました。DCマグネトロンスパッタリングプラズマの特性は、ターゲット表面、基板蒸着領域、バルクプラズマの3つの重要な領域で詳細に調査しました。プラズマソースからの制御され...

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Digital

Material Type
博士論文
Title
Water vapor in DC reactive magnetron sputtering plasma : characteristics and applications
Author/Editor
Catapang, Allen Vincent Barabona
Author Heading
Catapang, Allen Vincent Barabona
Publication Date
2023-09-20
Publication Date (W3CDTF)
2023-09-20
Alternative Title
反応性マグネトロンスパッタリングプラズマ中の水蒸気 : 特徴と応用
ハンノウセイ マグネトロン スパッタリング プラズマチュウ ノ スイジョウキ : トクチョウ ト オウヨウ
Degree grantor/type
同志社大学
Date Granted
2023-09-20
Date Granted (W3CDTF)
2023-09-20