高アスペクト比構造への高濃度H₂O₂ガス供給装置(Peroxidizer)を用いたALD成膜プロセス
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- Material Type
- 記事
- Author/Editor
- 幸田祥人村田逸人髙洋志
- Publication, Distribution, etc.
- Publication Date
- 2023-03
- Publication Date (W3CDTF)
- 2023-03
- Alternative Title
- ALD process using hydrogen peroxide (H₂O₂mix) for high aspect ratio structures
- Periodical title
- 大陽日酸技報
- No. or year of volume/issue
- (41)
- Volume
- (41)