縦型反転層ダイヤモンドMOSFET実現に向けたNi触媒エッチングを用いた横型Schottky-pnダイオードの開発
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- Material Type
- 記事
- Author/Editor
- 松本翼
- Publication, Distribution, etc.
- Alternative Title
- Development of lateral Schottky-pn diode using Ni catalyst etching for realization of vertical inversion channel diamond MOSFET
- Periodical title
- 研究助成成果報告書
- No. or year of volume/issue
- 平成30年度
- Volume
- 平成30年度
- Text Language Code
- jpn
- Persistent ID (NDL)
- info:ndljp/pid/14443788