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博士論文

Research on ultraclean wet technology for ULSI silicon devices

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Research on ultraclean wet technology for ULSI silicon devices

Call No. (NDL)
UT51-98-T277
Bibliographic ID of National Diet Library
000000326946
Persistent ID (NDL)
info:ndljp/pid/3141754
Material type
博士論文
Author
金鐘秀 [著]
Publisher
-
Date granted
平成10年3月25日
Material Format
Paper・Digital
Capacity, size, etc.
-
Degree grantor and degree
東北大学,博士 (工学)
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博士論文

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Table of Contents

Provided by：国立国会図書館デジタルコレクション

  • Table of Contents

    p1

  • CHAPTER1 INTRODUCTION

    p1

  • 1.1.General Background

    p1

  • 1.2.Background of Wafer Cleaning Technology

    p2

  • 1.3.Objectives and Approach

    p6

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Bibliographic Record

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Paper Digital

Material Type
博士論文
Title
Research on ultraclean wet technology for ULSI silicon devices
Author/Editor
金鐘秀 [著]
Author Heading
金, 鐘秀 キン, ショウシュウ
Alternative Title
ULSI用高性能ウェットプロセスの研究 ULSIヨウ コウセイノウ ウェット プロセス ノ ケンキュウ
Degree Grantor
東北大学
Date Granted
平成10年3月25日
Date Granted (W3CDTF)
1998
Dissertation Number
甲第6437号
Degree Type
博士 (工学)