塩素ガスを用いたGaN-MOCVD装置反応炉部品の洗浄装置（CLEANDEX-100）の開発
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- Material Type
- 記事
- Author/Editor
- 福田靖富田修康折田隆
- Publication, Distribution, etc.
- Publication Date
- 2006-11-28
- Publication Date (W3CDTF)
- 2006-11-28
- Extent
- 容量 : 02.pdf(573359bytes)
- Alternative Title
- Development of the ex situ dry cleaning equipment (CLEANDEX-100) for reactor component of GaN-MOCVD using chlorine gases
- Periodical title
- 大陽日酸技報
- No. or year of volume/issue
- (25)