オージェ電子分光法によるInP/GaInAsP多層膜の深さ方向分析 : Zalar回転および試料冷却の効果について
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- Material Type
- 記事
- Author/Editor
- 荻原俊弥田沼繁夫長沢勇二
- Publication, Distribution, etc.
- Publication Date
- 1992
- Publication Date (W3CDTF)
- 1992
- Alternative Title
- Depth profiling analysis of InP/GaInAsP multilayers by Auger electron spectroscopy. : effects of Zalar rotation and liquid nitrogen cold stage
- Periodical title
- 表面科学 : 日本表面科学会誌
- No. or year of volume/issue
- 13(8)
- Volume
- 13(8)