反射率差分光による表面/界面の評価と制御 : Si酸化・InAsぬれ層の最近のトピック
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- Material Type
- 記事
- Author/Editor
- 中山隆史
- Publication, Distribution, etc.
- Publication Date
- 2003-12
- Publication Date (W3CDTF)
- 2003-12
- Alternative Title
- Characterization and control of surfaces and interfaces by reflectance difference spectroscopy : recent topics of Si oxidation and InAs wetting layer
- Periodical title
- 表面科学 : 日本表面科学会誌
- No. or year of volume/issue
- 24(12)
- Volume
- 24(12)