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電子書籍・電子雑誌JFE技報
Volume number(13)
FIB(集束イオンビ...

FIB(集束イオンビーム)を利用した材料表層のピンポイント高分解能解析技術

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FIB(集束イオンビーム)を利用した材料表層のピンポイント高分解能解析技術

Persistent ID (NDL)
info:ndljp/pid/8678370
Material type
記事
Author
河野崇史ほか
Publisher
JFEスチール株式会社
Publication date
2006-08
Material Format
Digital
Journal name
JFE技報 (13)
Publication Page
-
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Digital

Material Type
記事
Author/Editor
河野崇史
濵田悦男
佐藤馨
Publication, Distribution, etc.
Publication Date
2006-08
Publication Date (W3CDTF)
2006-08
Alternative Title
Pinpoint high spatial resolution analysis technique on material surfaces using focused ion beam technique
Periodical title
JFE技報
No. or year of volume/issue
(13)
Volume
(13)