FIB(集束イオンビーム)を利用した材料表層のピンポイント高分解能解析技術
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- Material Type
- 記事
- Author/Editor
- 河野崇史濵田悦男佐藤馨
- Publication, Distribution, etc.
- Publication Date
- 2006-08
- Publication Date (W3CDTF)
- 2006-08
- Alternative Title
- Pinpoint high spatial resolution analysis technique on material surfaces using focused ion beam technique
- Periodical title
- JFE技報
- No. or year of volume/issue
- (13)
- Volume
- (13)