次世代パワー半導体素子のオーミック電極形成
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- Material Type
- 記事
- Author/Editor
- 前田将克
- Publication, Distribution, etc.
- Publication Date
- 2013
- Publication Date (W3CDTF)
- 2013
- Alternative Title
- Formation of ohmic electrodes on next-generation power semiconductor devices
- Periodical title
- 生産と技術
- No. or year of volume/issue
- 65(1)
- Volume
- 65(1)