マイクロ構造の3次元形状計測に向けた蛍光信号測定による垂直面の検出
Available in National Diet Library
Find on the publisher's website
NDL Digital Collections
Digital data available(生産技術振興協会)
Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 記事
- Author/Editor
- 福井彩乃
- Publication, Distribution, etc.
- Publication Date
- 2013
- Publication Date (W3CDTF)
- 2013
- Alternative Title
- Surface detection of vertical sidewall by measuring fluorescent signal for three-dimensional shape measurement of microstructures
- Periodical title
- 生産と技術
- No. or year of volume/issue
- 65(4)
- Volume
- 65(4)