New process for reclaiming test wafers without copper contamination
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- Material Type
- 記事
- Author/Editor
- Tetsuo SuzukiSatoru TakadaAkihiro Kawai
- Publication, Distribution, etc.
- Publication Date
- 2007-11
- Publication Date (W3CDTF)
- 2007-11
- Periodical title
- Kobelco technology review
- No. or year of volume/issue
- (27)
- Volume
- (27)
- ISSN (Periodical Title)
- 2188-0921
- ISSN-L (Periodical Title)
- 0913-4794
- Text Language Code
- eng
- Persistent ID (NDL)
- info:ndljp/pid/8704828
- Collection
- Collection (Materials For Handicapped People:1)
- Collection (particular)
- 国立国会図書館デジタルコレクション > 電子書籍・電子雑誌 > その他
- Acquisition Basis
- オンライン資料収集制度
- Date Accepted (W3CDTF)
- 2014-07-17T02:13:55+09:00
- Date Captured (W3CDTF)
- 2014-04-28
- Format (IMT)
- application/pdf
- Access Restrictions
- 国立国会図書館内限定公開
- Service for the Digitized Contents Transmission Service
- 図書館・個人送信対象外
- Availability of remote photoduplication service
- 可
- Periodical Title (URI)
- Periodical Title (Persistent ID (NDL))
- info:ndljp/pid/8704826
- Data Provider (Database)
- 国立国会図書館 : 国立国会図書館デジタルコレクション