液晶パネル配線膜におけるダイレクトコンタクト対応Al合金の開発
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- Material Type
- 記事
- Author/Editor
- 釘宮敏洋米田陽一郎後藤裕史
- Publication, Distribution, etc.
- Publication Date
- 2007-04-23
- Publication Date (W3CDTF)
- 2007-04-23
- Alternative Title
- Development of Al-Ni interconnections for TFT-LCDs using direct contacts with ITO and a-Si
- Periodical title
- R&D神戸製鋼技報
- No. or year of volume/issue
- (215)
- Volume
- (215)