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Chemical-mechanical polishing 2001 -- advances and future challenges : symposium held April 18-20, 2001, San Francisco, California, U.S.A. : Symposium M, "chemical-mechanical polishing 2001 -- advances and future challenges" : 2001 MRS spring meeting : Apr 2001, San Francisco, CA. (Materials Research Society Symposia Proceedings ; 671)

Chemical-mechanical polishing 2001 -- advances and future challenges : symposium held April 18-20, 2001, San Francisco, California, U.S.A. : Symposium M, "chemical-mechanical polishing 2001 -- advances and future challenges" : 2001 MRS spring meeting : Apr 2001, San Francisco, CA. (Materials Research Society Symposia Proceedings ; 671)
Paper図書
Materials Research Societyc2001.<M17-03-3220>
National Diet Library

Synthesis of silicon nitride particles in pulsed Rf plasmas SAND-95-2359C DE96 002122 CONF-95102361

Synthesis of silicon nitride particles in pulsed Rf plasmas SAND-95-2359C DE96 002122 CONF-95102361
Microform規格・テクニカルリポート類
Buss, R. J, Babu, S. V1995<LS-DE96/002122>
National Diet Library

Synthesis of silicon nitride powders in pulsed RF plasmas SAND-95-0934C DE95 011607 CONF-95052041

Synthesis of silicon nitride powders in pulsed RF plasmas SAND-95-0934C DE95 011607 CONF-95052041
Microform規格・テクニカルリポート類
Buss, R. J, Ho, P, Babu, S. V1995<LS-DE95/011607>
National Diet Library

Chemical mechanical polishing -- fundamentals and challenges : symposium held April 5-7, 1999, San Francisco, California, U.S.A.

Chemical mechanical polishing -- fundamentals and challenges : symposium held April 5-7, 1999, San Francisco, California, U.S.A.
Paper図書
editors: S.V. Babu ... [et al.]Materials Research Societyc2000
Other Libraries in Japan
  • Author HeadingBabu, S.V.

SYNTHESIS OF SILICON NITRIDE PARTICLES IN PULSED RF PLASMAS (SAND ; SAND-95-2359C)

SYNTHESIS OF SILICON NITRIDE PARTICLES IN PULSED RF PLASMAS (SAND ; SAND-95-2359C)
Paper図書
BUSS, R.J.// BABU, S.V. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1995.
Other Libraries in Japan
  • Author HeadingBUSS, R.J. BABU, S.V.

SYNTHESIS OF SILICON NITRIDE POWDERS IN PULSED RF PLASMAS (SAND ; SAND-95-0934C)

SYNTHESIS OF SILICON NITRIDE POWDERS IN PULSED RF PLASMAS (SAND ; SAND-95-0934C)
Paper図書
BUSS, R.J.// HO, P.// BABU, S.V. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1995.
Other Libraries in Japan
  • Author HeadingBUSS, R.J. HO, P. BABU, S.V.

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