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Rf-plasma synthesis of nanosize silicon carbide and nitride. Final report SAND-97-0039 DE97 004149

Rf-plasma synthesis of nanosize silicon carbide and nitride. Final report SAND-97-0039 DE97 004149
Microform規格・テクニカルリポート類
Buss, R. J1997<LS-DE97/004149>
National Diet Library

Nanoparticle synthesis in pulsed low temperature discharges SAND-96-1235C DE96 010537 CONF-96051673

Nanoparticle synthesis in pulsed low temperature discharges SAND-96-1235C DE96 010537 CONF-96051673
Microform規格・テクニカルリポート類
Buss, R. J1996<LS-DE96/010537>
National Diet Library

Synthesis of silicon nitride powders in pulsed RF plasmas SAND-95-0934C DE95 011607 CONF-95052041

Synthesis of silicon nitride powders in pulsed RF plasmas SAND-95-0934C DE95 011607 CONF-95052041
Microform規格・テクニカルリポート類
Buss, R. J, Ho, P, Babu, S. V1995<LS-DE95/011607>
National Diet Library

Synthesis of silicon nitride particles in pulsed Rf plasmas SAND-95-2359C DE96 002122 CONF-95102361

Synthesis of silicon nitride particles in pulsed Rf plasmas SAND-95-2359C DE96 002122 CONF-95102361
Microform規格・テクニカルリポート類
Buss, R. J, Babu, S. V1995<LS-DE96/002122>
National Diet Library

Final technical report for (open quotes)application of IRIS to semiconductor plasma processing(close quotes) (CRADA No. 1031) SAND-94-2439 DE95 003591

Final technical report for (open quotes)application of IRIS to semiconductor plasma processing(close quotes) (CRADA No. 1031) SAND-94-2439 DE95 003591
Microform規格・テクニカルリポート類
Ho, P, Killeen, K. P, Melius, C. F, Buss, R. J1994<LS-DE95/003591>
National Diet Library

NANOPARTICLE SYNTHESIS IN PULSED LOW TEMPERATURE DISCHARGES (SAND ; SAND-96-1235C)

NANOPARTICLE SYNTHESIS IN PULSED LOW TEMPERATURE DISCHARGES (SAND ; SAND-96-1235C)
Paper図書
BUSS, R.J. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1996.
Other Libraries in Japan
  • Author HeadingBUSS, R.J.

SYNTHESIS OF SILICON NITRIDE PARTICLES IN PULSED RF PLASMAS (SAND ; SAND-95-2359C)

SYNTHESIS OF SILICON NITRIDE PARTICLES IN PULSED RF PLASMAS (SAND ; SAND-95-2359C)
Paper図書
BUSS, R.J.// BABU, S.V. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1995.
Other Libraries in Japan
  • Author HeadingBUSS, R.J. BABU, S.V.

SYNTHESIS OF SILICON NITRIDE POWDERS IN PULSED RF PLASMAS (SAND ; SAND-95-0934C)

SYNTHESIS OF SILICON NITRIDE POWDERS IN PULSED RF PLASMAS (SAND ; SAND-95-0934C)
Paper図書
BUSS, R.J.// HO, P.// BABU, S.V. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1995.
Other Libraries in Japan
  • Author HeadingBUSS, R.J. HO, P. BABU, S.V.

CHEMISTRY OF PARTICULATE FORMATION IN FLUOROCARBON PLASMAS (SAND ; SAND-93-2057C)

CHEMISTRY OF PARTICULATE FORMATION IN FLUOROCARBON PLASMAS (SAND ; SAND-93-2057C)
Paper図書
BUSS, R.J.// HARELAND, W.A. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1993.
Other Libraries in Japan
  • Author HeadingBUSS, R.J. HARELAND, W.A.

OPTICAL DIAGNOSTIC INSTRUMENT FOR MONITORING ETCH UNIFORMITY DURING PLASMA ETCHING OF POLYSILICON IN A CHLORINE-HELIUM PLASMA (SAND ; SAND-93-0455)

OPTICAL DIAGNOSTIC INSTRUMENT FOR MONITORING ETCH UNIFORMITY DURING PLASMA ETCHING OF POLYSILICON IN A CHLORINE-HELIUM PLASMA (SAND ; SAND-93-0455)
Paper図書
HARELAND, W.A.// BUSS, R.J. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1993.
Other Libraries in Japan
  • Author HeadingHARELAND, W.A. BUSS, R.J.

FINAL TECHNICAL REPORT FOR "APPLICATION OF IRIS TO SEMICONDUCTOR PLASMA PROCESSING" (CRADA NO. 1031) (SAND ; SAND-94-2439)

FINAL TECHNICAL REPORT FOR "APPLICATION OF IRIS TO SEMICONDUCTOR PLASMA PROCESSING" (CRADA NO. 1031) (SAND ; SAND-94-2439)
Paper図書
HO, P.// KILLEEN, K.P.// MELIUS, C.F.// BUSS, R.J. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1994.
Other Libraries in Japan
  • Author HeadingHO, P. KILLEEN, K.P. MELIUS, C.F. BUSS, R.J.

CHEMISTRY OF SI/SUB 3/N/SUB 4/ AND SI DEPOSITION STUDIED USING MOLECULAR BEAM TECHNIQUES (SAND ; SAND-92-0722C)

CHEMISTRY OF SI/SUB 3/N/SUB 4/ AND SI DEPOSITION STUDIED USING MOLECULAR BEAM TECHNIQUES (SAND ; SAND-92-0722C)
Paper図書
BUSS, R.J.// HO, P.// BREILAND, W.G. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1992.
Other Libraries in Japan
  • Author HeadingBUSS, R.J. HO, P. BREILAND, W.G.

RAPID PLASMA CLEANING AS A WASTE MINIMIZATION TOOL (SAND ; SAND-91-2452)

RAPID PLASMA CLEANING AS A WASTE MINIMIZATION TOOL (SAND ; SAND-91-2452)
Paper図書
WARD, P.P.// BUSS, R.J. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1992.
Other Libraries in Japan
  • Author HeadingWARD, P.P. BUSS, R.J.

MECHANISTIC STUDIES OF THE CVD OF SILICON NITRIDE FROM SIF/SUB 4/ AND NH/SUB 3/ (SAND ; SAND-92-2441C)

MECHANISTIC STUDIES OF THE CVD OF SILICON NITRIDE FROM SIF/SUB 4/ AND NH/SUB 3/ (SAND ; SAND-92-2441C)
Paper図書
BUSS, R.J.// HO, P. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES)).Sandia National Laboratories(Sandia National Laboratories)1992.
Other Libraries in Japan
  • Author HeadingBUSS, R.J. HO, P.

DIRECT MEASUREMENT OF THE REACTIVITY OF NH AND OH ON A SILICON NITRIDE SURFACE (SAND ; SAND-93-1456C)

DIRECT MEASUREMENT OF THE REACTIVITY OF NH AND OH ON A SILICON NITRIDE SURFACE (SAND ; SAND-93-1456C)
Paper図書
BUSS, R.J.// HO, P.// BREILAND, W.G.// FISHER, E.R. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1993.
Other Libraries in Japan
  • Author HeadingBUSS, R.J. HO, P. BREILAND, W.G. FISHER,...

POROUS MATERIALS BY DESIGN. PLASMA OXIDATION OF HYDROCARBON TEMPLATES IN POLYSILSESQUIOXANES (SAND ; SAND-92-2522)

POROUS MATERIALS BY DESIGN. PLASMA OXIDATION OF HYDROCARBON TEMPLATES IN POLYSILSESQUIOXANES (SAND ; SAND-92-2522)
Paper図書
LOY, D.A.// BUSS, R.J.// ASSINK, R.A.// SHEA, K.J.// OVIATT, H. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1992.
Other Libraries in Japan
  • Author HeadingLOY, D.A. BUSS, R.J. ASSINK, R.A. SHEA, K.J. OVIAT...

WIDE RANGE H/SUB 2/ SENSOR USING CATALYTIC ALLOYS (SAND ; SAND-92-2382C)

WIDE RANGE H/SUB 2/ SENSOR USING CATALYTIC ALLOYS (SAND ; SAND-92-2382C)
Paper図書
HUGHES, R.C.// BUSS, R.J.// REYNOLDS, S.W.// JENKINS, M.W.// RODRIGUEZ, J.L. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1992.
Other Libraries in Japan
  • Author HeadingHUGHES, R.C. BUSS, R.J. REYNOLDS, S.W. JENKINS, M.W. ...

OPTICAL DIAGNOSTICS FOR LOW-TEMPERATURE PLASMAS (SAND ; SAND-90-1754C)

OPTICAL DIAGNOSTICS FOR LOW-TEMPERATURE PLASMAS (SAND ; SAND-90-1754C)
Paper図書
HARELAND, W.A.// BUSS, R.J. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (USA))Sandia National Laboratories(Sandia National Laboratories)1990.
Other Libraries in Japan
  • Author HeadingHARELAND, W.A. BUSS, R.J.

LASER STUDIES OF THE INTERACTION OF SIO WITH THE SURFACE OF A THIN FILM (SAND ; SAND-90-1789C)

LASER STUDIES OF THE INTERACTION OF SIO WITH THE SURFACE OF A THIN FILM (SAND ; SAND-90-1789C)
Paper図書
HO, P.// BUSS, R.J.// WEBER, M.E. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (USA))Sandia National Laboratories(Sandia National Laboratories)1990.
Other Libraries in Japan
  • Author HeadingHO, P. BUSS, R.J. WEBER, M.E.

Laser studies of the SiH radical/surface interaction during deposition of a thin film (SAND ; SAND-88-1641C; CONF-881155-15; DE89003902)

Laser studies of the SiH radical/surface interaction during deposition of a thin film (SAND ; SAND-88-1641C; CONF-881155-15; DE89003902)
Paper図書
Ho, P., Buss, R.J., Breiland, W.G.Sandia National Labs.1988.1.
Other Libraries in Japan
  • Author HeadingHo, P. Buss, R.J. Breiland, W.G.
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