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Characteristics of CVD ternary refractory nitride diffusion barriers SAND-96-2799C DE97 001315 CONF-96092742

Characteristics of CVD ternary refractory nitride diffusion barriers SAND-96-2799C DE97 001315 CONF-96092742
Microform規格・テクニカルリポート類
Fleming, J. G, Smith, P. M, Custer, J. S1996<LS-DE97/001315>
National Diet Library

Thermal metalorganic chemical vapor deposition of Ti-Si-N films for diffusion barrier applications SAND-96-0919C DE96 009176 CONF-9604014

Thermal metalorganic chemical vapor deposition of Ti-Si-N films for diffusion barrier applications SAND-96-0919C DE96 009176 CONF-9604014
Microform規格・テクニカルリポート類
Custer, J. S, Smith, P. M, Jones, R. V, Maverick, A. W, Roberts, D. A1996<LS-DE96/009176>
National Diet Library

Chemical vapor deposition of ternary refractory nitrides for diffusion barrier applications SAND-96-0701C DE96 011817 CONF-96061042

Chemical vapor deposition of ternary refractory nitrides for diffusion barrier applications SAND-96-0701C DE96 011817 CONF-96061042
Microform規格・テクニカルリポート類
Smith, P. M, Custer, J. S, Fleming, J. G, Roherty-Osmun, E, Cohn, M1996<LS-DE96/011817>
National Diet Library

Chemical vapor deposition of Ti-Si-N films for diffusion barrier applications SAND-95-1469C DE96 001945 CONF-95101613

Chemical vapor deposition of Ti-Si-N films for diffusion barrier applications SAND-95-1469C DE96 001945 CONF-95101613
Microform規格・テクニカルリポート類
Smith, P. M, Custer, J. S, Jones, R. V1995<LS-DE96/001945>
National Diet Library

Reciprocal space analysis of the microstructure of luminescent and nonluminescent porous silicon films SAND-94-1736C DE95 005420 CONF-94114442

Reciprocal space analysis of the microstructure of luminescent and nonluminescent porous silicon films SAND-94-1736C DE95 005420 CONF-94114442
Microform規格・テクニカルリポート類
Lee, S. R, Barbour, J. C, Medernach, J. W, Stevenson, J. O, Custer, J. S1994<LS-DE95/005420>
National Diet Library

Copper CVD using liquid coinjection of (hfac)Cu(TMVS) and TMVS SAND-94-2544C DE95 008155 CONF-94101781

Copper CVD using liquid coinjection of (hfac)Cu(TMVS) and TMVS SAND-94-2544C DE95 008155 CONF-94101781
Microform規格・テクニカルリポート類
Custer, J. S, Petersen, G. A, Smith, P. M, Parmeter, J. E, Apblett, C. A1994<LS-DE95/008155>
National Diet Library

CHEMICAL VAPOR DEPOSITION OF TI-SI-N FILMS FOR DIFFUSION BARRIER APPLICATIONS (SAND ; SAND-95-1469C)

CHEMICAL VAPOR DEPOSITION OF TI-SI-N FILMS FOR DIFFUSION BARRIER APPLICATIONS (SAND ; SAND-95-1469C)
Paper図書
SMITH, P.M.// CUSTER, J.S.// JONES, R.V. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1995.
Other Libraries in Japan
  • Author HeadingSMITH, P.M. CUSTER, J.S. JONES, R.V.

CHEMICAL VAPOR DEPOSITION OF TERNARY REFRACTORY NITRIDES FOR DIFFUSION BARRIER APPLICATIONS (SAND ; SAND-96-0701C)

CHEMICAL VAPOR DEPOSITION OF TERNARY REFRACTORY NITRIDES FOR DIFFUSION BARRIER APPLICATIONS (SAND ; SAND-96-0701C)
Paper図書
SMITH, P.M.// CUSTER, J.S.// FLEMING, J.G.// ROHERTY-OSMUN, E.// COHN, M.// JONES, R.V. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1996.
Other Libraries in Japan
  • Author HeadingSMITH, P.M. CUSTER, J.S. FLEMING, J.G. ROHERTY-OSMUN, ...

THERMAL METALORGANIC CHEMICAL VAPOR DEPOSITION OF TI-SI-N FILMS FOR DIFFUSION BARRIER APPLICATIONS (SAND ; SAND-96-0919C)

THERMAL METALORGANIC CHEMICAL VAPOR DEPOSITION OF TI-SI-N FILMS FOR DIFFUSION BARRIER APPLICATIONS (SAND ; SAND-96-0919C)
Paper図書
CUSTER, J.S.// SMITH, P.M.// JONES, R.V.// MAVERICK, A.W.// ROBERTS, D.A.// NORMAN, J.A.T.// HOCHBERG, A.K. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1996.
Other Libraries in Japan
  • Author HeadingCUSTER, J.S. SMITH, P.M. JONES, R.V. MAVER...

RECIPROCAL SPACE ANALYSIS OF THE MICROSTRUCTURE OF LUMINESCENT AND NONLUMINESCENT POROUS SILICON FILMS (SAND ; SAND-94-1736C)

RECIPROCAL SPACE ANALYSIS OF THE MICROSTRUCTURE OF LUMINESCENT AND NONLUMINESCENT POROUS SILICON FILMS (SAND ; SAND-94-1736C)
Paper図書
LEE, S.R.// BARBOUR, J.C.// MEDERNACH, J.W.// STEVENSON, J.O.// CUSTER, J.S. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1994.
Other Libraries in Japan
  • Author HeadingLEE, S.R. BARBOUR, J.C. MEDERNACH, J.W. STEVENSON, J.O. CUSTER, J.S.

COPPER CVD USING LIQUID COINJECTION OF (HFAC)CU(TMVS) AND TMVS (SAND ; SAND-94-2544C)

COPPER CVD USING LIQUID COINJECTION OF (HFAC)CU(TMVS) AND TMVS (SAND ; SAND-94-2544C)
Paper図書
CUSTER, J.S.// PETERSEN, G.A.// SMITH, P.M.// PARMETER, J.E.// APBLETT, C.A.// NORMAN, J.A.T.// HOCHBERG, A.K.// ROBERTS, D.A. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1994.
Other Libraries in Japan
  • Author HeadingCUSTER, J.S. PETERSEN, G.A. SMITH, P.M. PA...

ECR PLASMA SYNTHESIS OF SILICON NITRIDE FILMS ON GAAS AND INSB (SAND ; SAND-93-1662C)

ECR PLASMA SYNTHESIS OF SILICON NITRIDE FILMS ON GAAS AND INSB (SAND ; SAND-93-1662C)
Paper図書
BARBOUR, J.C.// LOVEJOY, M.L.// ASHBY, C.I.H.// HOWARD, A.J.// CUSTER, J.S.// SHUL, R.J. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1993.
Other Libraries in Japan
  • Author HeadingBARBOUR, J.C. LOVEJOY, M.L. ASHBY, C.I.H. HOWARD, A.J. CUSTER, J.S. SHUL, R.J.

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