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EUV lithography cost of ownership analysis UCRL-JC-119626 DE95 014675 CONF-94091779

EUV lithography cost of ownership analysis UCRL-JC-119626 DE95 014675 CONF-94091779
Microform規格・テクニカルリポート類
Hawryluk, A. M, Ceglio, N. M1995<LS-DE95/014675>
National Diet Library

EUV LITHOGRAPHY COST OF OWNERSHIP ANALYSIS (UCRL ; UCRL-JC-119626)

EUV LITHOGRAPHY COST OF OWNERSHIP ANALYSIS (UCRL ; UCRL-JC-119626)
Paper図書
HAWRYLUK, A.M.// CEGLIO, N.M. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))University of California Research Laboratory(University of California Research Laboratory)1995.
Other Libraries in Japan
  • Author HeadingHAWRYLUK, A.M. CEGLIO, N.M.

MICROTECHNOLOGY: THE KEY TO THE TECHNICAL CHALLENGES OF THE 21ST CENTURY. (UCRL ; UCRL-JC-115147)

MICROTECHNOLOGY: THE KEY TO THE TECHNICAL CHALLENGES OF THE 21ST CENTURY. (UCRL ; UCRL-JC-115147)
Paper図書
CEGLIO, N.M. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))University of California Research Laboratory(University of California Research Laboratory)1993.
Other Libraries in Japan
  • Author HeadingCEGLIO, N.M.

COORDINATED US PROGRAM IN SOFT X-RAY PROJECTION LITHOGRAPHY (UCRL ; UCRL-ID-110194)

COORDINATED US PROGRAM IN SOFT X-RAY PROJECTION LITHOGRAPHY (UCRL ; UCRL-ID-110194)
Paper図書
CEGLIO, N.M. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))University of California Research Laboratory(University of California Research Laboratory)1992.
Other Libraries in Japan
  • Author HeadingCEGLIO, N.M.

WAVELENGTH CONSIDERATIONS IN SOFT X-RAY PROJECTION LITHOGRAPHY (UCRL ; UCRL-JC-111712)

WAVELENGTH CONSIDERATIONS IN SOFT X-RAY PROJECTION LITHOGRAPHY (UCRL ; UCRL-JC-111712)
Paper図書
HAWRYLUK, A.M.// CEGLIO, N.M. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))University of California Research Laboratory(University of California Research Laboratory)1992.
Other Libraries in Japan
  • Author HeadingHAWRYLUK, A.M. CEGLIO, N.M.

SOFT X-RAY PROJECTION LITHOGRAPHY SYSTEM DESIGN AND COST ANALYSIS (UCRL ; UCRL-JC-108670)

SOFT X-RAY PROJECTION LITHOGRAPHY SYSTEM DESIGN AND COST ANALYSIS (UCRL ; UCRL-JC-108670)
Paper図書
CEGLIO, N.M.// HAWRYLUK, A.M. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))University of California Research Laboratory(University of California Research Laboratory)1991.
Other Libraries in Japan
  • Author HeadingCEGLIO, N.M. HAWRYLUK, A.M.

PROCEEDINGS OF THE FIRST TECHNICAL SYMPOSIUM ON SOFT X-RAY PROJECTION LITHOGRAPHY: VIDEO GUIDEBOOK (CONF ; CONF-9001104-)

PROCEEDINGS OF THE FIRST TECHNICAL SYMPOSIUM ON SOFT X-RAY PROJECTION LITHOGRAPHY: VIDEO GUIDEBOOK (CONF ; CONF-9001104-)
Paper図書
CEGLIO, N.M. (ED.). (LAWRENCE LIVERMORE NATIONAL LAB., CA (USA))1990.
Other Libraries in Japan
  • Author HeadingCEGLIO, N.M..

WAFER COST ANALYSIS FOR A SOFT X-RAY PROJECTION LITHOGRAPHY SYSTEM (UCRL ; UCRL-JC-107888)

WAFER COST ANALYSIS FOR A SOFT X-RAY PROJECTION LITHOGRAPHY SYSTEM (UCRL ; UCRL-JC-107888)
Paper図書
CEGLIO, N.M.// HAWRYLUK, A.M. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))University of California Research Laboratory(University of California Research Laboratory)1991.
Other Libraries in Japan
  • Author HeadingCEGLIO, N.M. HAWRYLUK, A.M.

DISTORTION FREE PROJECTION LITHOGRAPHY (UCRL ; UCRL-JC-107889)

DISTORTION FREE PROJECTION LITHOGRAPHY (UCRL ; UCRL-JC-107889)
Paper図書
HAWRYLUK, A.M.// CEGLIO, N.M.// PHILLION, D.W.// GAINES, D.P. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))University of California Research Laboratory(University of California Research Laboratory)1991.
Other Libraries in Japan
  • Author HeadingHAWRYLUK, A.M. CEGLIO, N.M. PHILLION, D.W. GAINES, D.P.

VIRTUALLY DISTORTION-FREE IMAGING SYSTEM FOR LARGE FIELD, HIGH RESOLUTION LITHOGRAPHY USING ELECTRONS, IONS OR OTHER PARTICLE BEAMS (PATENTS-US ; PATENTS-US-A7683011)

VIRTUALLY DISTORTION-FREE IMAGING SYSTEM FOR LARGE FIELD, HIGH RESOLUTION LITHOGRAPHY USING ELECTRONS, IONS OR OTHER PARTICLE BEAMS (PATENTS-US ; PATENTS-US-A7683011)
Paper図書
HAWRYLUK, A.M.// CEGLIO, N.M. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))1991.
Other Libraries in Japan
  • Author HeadingHAWRYLUK, A.M. CEGLIO, N.M.

REPAIR OF HIGH PERFORMANCE MULTILAYER COATINGS (UCRL ; UCRL-JC-108297)

REPAIR OF HIGH PERFORMANCE MULTILAYER COATINGS (UCRL ; UCRL-JC-108297)
Paper図書
GAINES, D.P.// CEGLIO, N.M.// VERNON, S.P.// KRUMREY, M.// MUELLER, P. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))University of California Research Laboratory(University of California Research Laboratory)1991.
Other Libraries in Japan
  • Author HeadingGAINES, D.P. CEGLIO, N.M. VERNON, S.P. KRUMREY, M. MUEL...

RADIATION HARDNESS OF MO/SI MULTILAYERS DESIGNED FOR USE IN A SOFT X- RAY PROJECTION LITHOGRAPHY SYSTEM (UCRL ; UCRL-JC-111725)

RADIATION HARDNESS OF MO/SI MULTILAYERS DESIGNED FOR USE IN A SOFT X- RAY PROJECTION LITHOGRAPHY SYSTEM (UCRL ; UCRL-JC-111725)
Paper図書
GAINES, D.P.// SPITZER, R.C.// CEGLIO, N.M.// KRUMREY, M.// ULM, G. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))University of California Research Laboratory(University of California Research Laboratory)1992.
Other Libraries in Japan
  • Author HeadingGAINES, D.P. SPITZER, R.C. CEGLIO, N.M. KRUMREY, M. ULM, G.

X-RAY LASER CAVITY EXPERIMENTS. (UCRL ; UCRL-95989)

X-RAY LASER CAVITY EXPERIMENTS. (UCRL ; UCRL-95989)
Paper図書
CEGLIO, N.M.(et al.)California Univ., Livermore (USA). Lawrence Livermore Lab(California Univ., Livermore (USA). Lawrence Livermore Lab)1987.
Other Libraries in Japan
  • Author HeadingCEGLIO, N.M.

BROADBAND DIFFRACTIVE LENS (UCRL ; UCRL-JC-107319)

BROADBAND DIFFRACTIVE LENS (UCRL ; UCRL-JC-107319)
Paper図書
CEGLIO, N.M.// HAWRYLUK, A.M.// LONDON, R.A.// SEPPALA, L.G.// GAINES, D.P. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))University of California Research Laboratory(University of California Research Laboratory)1991.
Other Libraries in Japan
  • Author HeadingCEGLIO, N.M. HAWRYLUK, A.M. LONDON, R.A. S...

X-RAY OPTICS FOR X-RAY LASER RESEARCH AND APPLICATIONS. (UCRL ; UCRL-99946)

X-RAY OPTICS FOR X-RAY LASER RESEARCH AND APPLICATIONS. (UCRL ; UCRL-99946)
Paper図書
CEGLIO, N.M.California Univ., Livermore (USA). Lawrence Livermore Lab(California Univ., Livermore (USA). Lawrence Livermore Lab)1988.
Other Libraries in Japan
  • Author HeadingCEGLIO, N.M.

MULTILAYER COATINGS ON FIGURED OPTICS (UCRL ; UCRL-JC-108298)

MULTILAYER COATINGS ON FIGURED OPTICS (UCRL ; UCRL-JC-108298)
Paper図書
VERNON, S.P.// STEARNS, D.G.// ROSEN, R.S.// CEGLIO, N.M.// GAINES, D.P.// KRUMREY, M.// MUELLER, P. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))University of California Research Laboratory(University of California Research Laboratory)1991.
Other Libraries in Japan
  • Author HeadingVERNON, S.P. STEARNS, D.G. ROSEN, R.S. CEGLIO, N.M. GAINES, D.P. KRUMREY, M. MUEL...

REFLECTION MASKS FOR SOFT X-RAY PROJECTION LITHOGRAPHY (UCRL ; UCRL-JC-108669)

REFLECTION MASKS FOR SOFT X-RAY PROJECTION LITHOGRAPHY (UCRL ; UCRL-JC-108669)
Paper図書
HAWRYLUK, A.M.// CEGLIO, N.M.// PHILLION, D.W.// GAINES, D.P.// BROWNING, R.// PEASE, R.F.// STEWART, D.// ECONOMOU, N. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))University of California Research Laboratory(University of California Research Laboratory)1991.
Other Libraries in Japan
  • Author HeadingHAWRYLUK, A.M. CEGLIO, N.M. PHILLION, D.W. GAINES, D.P. B...

TIME AND SPACE RESOLVED SPECTROSCOPY OF X-RAY LASER EXPERIMENTS FROM 81A TO 220 A. (UCRL ; UCRL-95706)

TIME AND SPACE RESOLVED SPECTROSCOPY OF X-RAY LASER EXPERIMENTS FROM 81A TO 220 A. (UCRL ; UCRL-95706)
Paper図書
CEGLIO, N.M.(et al.)California Univ., Livermore (USA). Lawrence Livermore Lab(California Univ., Livermore (USA). Lawrence Livermore Lab)1987.
Other Libraries in Japan
  • Author HeadingCEGLIO, N.M.

SOFT X-RAY LASER CAVITIES. (UCRL ; UCRL-95089)

SOFT X-RAY LASER CAVITIES. (UCRL ; UCRL-95089)
Paper図書
CEGLIO, N.M.(et al.)California Univ., Livermore (USA). Lawrence Livermore Lab(California Univ., Livermore (USA). Lawrence Livermore Lab)1986.
Other Libraries in Japan
  • Author HeadingCEGLIO, N.M.

ADVANCES IN X-RAY OPTICS, 1987. (UCRL ; UCRL-97612)

ADVANCES IN X-RAY OPTICS, 1987. (UCRL ; UCRL-97612)
Paper図書
CEGLIO, N.M.California Univ., Livermore (USA). Lawrence Livermore Lab(California Univ., Livermore (USA). Lawrence Livermore Lab)1987.
Other Libraries in Japan
  • Author HeadingCEGLIO, N.M.
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