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電子線リソグラフィによる超精密微細加工技術とそのナノインプリントモールド製造への応用に関する研究
電子線リソグラフィによる超精密微細加工技術とそのナノインプリントモールド製造への応用に関する研究
Paper
博士論文
法元盛久 [著]
[法元盛久]
[2011]
<UT51-2011-P64>
National Diet Library
フォトマスク : 電子部品製造の基幹技術
フォトマスク : 電子部品製造の基幹技術
Paper
Digital
図書
田邉功, 竹花洋一, 法元盛久 共著
東京電機大学出版局
2011.4
<ND386-J131>
National Diet Library
Other Libraries in Japan
Photomask and next-generation lithography mask technology 13 : 18-20 April 2006 : Yokohama, Japan. : Apr 2006, Yokohama, Japan. (SPIE Proceedings ; 6283)
Photomask and next-generation lithography mask technology 13 : 18-20 April 2006 : Yokohama, Japan. : Apr 2006, Yokohama, Japan. (SPIE Proceedings ; 6283)
Paper
図書
SPIE
c2006.
<M17-06-2188>
National Diet Library
Author Heading
Japan Society of Applied Physics.
Hoga, Morihisa.
入門フォトマスク技術 : LSI,FPD,PWB,MEMSのためのフォトマスク
入門フォトマスク技術 : LSI,FPD,PWB,MEMSのためのフォトマスク
Paper
図書
田邉功, 竹花洋一, 法元盛久 著
工業調査会
2006.12
<ND386-H207>
National Diet Library
Other Libraries in Japan
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