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Advances in resist technology : March 12-13, 1984, Santa Clara, California / C. Grant Willson, chairman/editor. (Proceedings of SPIE--the International Society for Optical Engineering ; v. 469)

Advances in resist technology : March 12-13, 1984, Santa Clara, California / C. Grant Willson, chairman/editor. (Proceedings of SPIE--the International Society for Optical Engineering ; v. 469)
Paper図書
SPIE--the International Society for Optical Engineeringc1984.<M15-A4717>
National Diet Library
  • Author HeadingWillson, C. G. (C. Grant) , 1939- Society of Photo-optical Inst...

Introduction to microlithography : theory, materials, and processing / L.F. Thompson, editor, C.G. Willson, editor, M.J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983. (ACS symposium series)

Introduction to microlithography : theory, materials, and processing / L.F. Thompson, editor, C.G. Willson, editor, M.J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983. (ACS symposium series)
Paper図書
The Society1983.<M15-A52>
National Diet LibraryOther Libraries in Japan
  • Author HeadingThompson, L. F., 1944- Willson, C. G. (C. Grant) , 1939- Bowden, M. J., 1943- American...

Materials for microlithography : radiation-sensitive polymers / L.F. Thompson, editor, C.G. Willson, editor, J.M.J. Fréchet, editor ; based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of Polymer Chemistry, at the 187th Meeting of the American Chemical Society, St. Louis, Missouri, April 8-13, 1984. (ACS symposium series)

Materials for microlithography : radiation-sensitive polymers / L.F. Thompson, editor, C.G. Willson, editor, J.M.J. Fréchet, editor ; based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of Polymer Chemistry, at the 187th Meeting of the American Chemical Society, St. Louis, Missouri, April 8-13, 1984. (ACS symposium series)
Paper図書
The Society1984.<M15-A2628>
National Diet LibraryOther Libraries in Japan
  • Author HeadingThompson, L. F., 1944- Willson, C. G. (C. Grant) , 1939- Fréchet, J. M. J. American Ch...

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