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Silicon wet bulk micromachining for MEMS

Silicon wet bulk micromachining for MEMS
Paper図書
Prem Pal, Kasuo Sato.Pan Stanford Publishing[2017]<ND371-B108>
National Diet Library
  • Subject HeadingMicroelectromechanical systems. Micromachining.

2016 symposium on design, test, integration and packaging of MEMS/MOEMS (DTIP 2016) : Budapest, Hungary : 30 May-2 June 2016 : symposium on design, test, integration & packaging of MEMS and MOEMS : May 2016, Budapest, Hungary.

2016 symposium on design, test, integration and packaging of MEMS/MOEMS (DTIP 2016) : Budapest, Hungary : 30 May-2 June 2016 : symposium on design, test, integration & packaging of MEMS and MOEMS : May 2016, Budapest, Hungary.
Paper図書
IEEE[2016]<M17-18-364>
National Diet Library
  • Subject Heading...s--Congresses. Micromachining--Congresses. O......nic packaging. Micromachining. Optoelectronic devices.

Comprehensive materials finishing

Comprehensive materials finishing
Paper図書
editor-in-chief, MSJ Hashmi.Elsevier[2017]<NB55-B8>
National Diet Library
  • Subject HeadingFinishes and finishing. Machining. Metals--Heat treatment. Micromachining. Coating processes.

2015 symposium on design, test, integration and packaging of MEMS/MOEMS : (DTIP 2015) : Montpellier, France : 27-30 April 2015 : symposium on design, test, integration & packaging of MEMS and MOEMS : Apr 2015, Montpellier, France.

2015 symposium on design, test, integration and packaging of MEMS/MOEMS : (DTIP 2015) : Montpellier, France : 27-30 April 2015 : symposium on design, test, integration & packaging of MEMS and MOEMS : Apr 2015, Montpellier, France.
Paper図書
IEEE[2015]<M17-17-647>
National Diet Library
  • Subject Heading...s--Congresses. Micromachining--Congresses. O......nic packaging. Micromachining. Optoelectronic devices.

Micromachining and microfabrication process technology XIX : 4-6 February 2014 : San Francisco, California, United States : Feb 2014, San Francisco, CA. (SPIE Proceedings ; 8973)

Micromachining and microfabrication process technology XIX : 4-6 February 2014 : San Francisco, California, United States : Feb 2014, San Francisco, CA. (SPIE Proceedings ; 8973)
Paper図書
SPIE[2014]<M17-14-2667>
National Diet Library
  • Subject HeadingMicromachining--Congresses. Microfabrication...
  • Alternative TitleMicromachining and microfabrication process ...
  • Alternative TitleMicromachining and microfabrication process ...

2014 symposium on design, test, integration and packaging of MEMS/MOEMS : (DTIP 2014) : Cannes, France : 1-4 April 2014 : CAD, design and test conference : microfabrication, integration and packaging conference : Apr 2014, Cannes, France.

2014 symposium on design, test, integration and packaging of MEMS/MOEMS : (DTIP 2014) : Cannes, France : 1-4 April 2014 : CAD, design and test conference : microfabrication, integration and packaging conference : Apr 2014, Cannes, France.
Paper図書
IEEE[2014]<M17-16-1289>
National Diet Library
  • Subject Heading...s--Congresses. Micromachining--Congresses. M......nic packaging. Micromachining. Optoelectronic devices.

2012 symposium on design, test, integration and packaging of MEMS/MOEMS : (DTIP 2012) : Cannes, France : 25-27 April 2012 : conference on CAD, design and test : conference on microfabrication, integration and packaging : Apr 2012, Cannes, France.

2012 symposium on design, test, integration and packaging of MEMS/MOEMS : (DTIP 2012) : Cannes, France : 25-27 April 2012 : conference on CAD, design and test : conference on microfabrication, integration and packaging : Apr 2012, Cannes, France.
Paper図書
IEEE[2012]<M17-14-3019>
National Diet Library
  • Subject Heading...s--Congresses. Micromachining--Congresses. M......nic packaging. Micromachining. Optoelectronic devices.

Skills Framework for precision engineering : a guide to occupations and skills.

Skills Framework for precision engineering : a guide to occupations and skills.
Paper図書
[SkillsFuture Singapore]2019.<EL121-P7>
National Diet Library
  • Subject HeadingMicromachining--Vocational guidance--Singapo...

2013 symposium on design, test, integration and packaging of MEMS/MOEMS : (DTIP 2013) : Barcelona, Spain : 16-18 April 2013 : Apr 2013, Barcelona, Spain.

2013 symposium on design, test, integration and packaging of MEMS/MOEMS : (DTIP 2013) : Barcelona, Spain : 16-18 April 2013 : Apr 2013, Barcelona, Spain.
Paper図書
IEEEc2013.<M17-14-991>
National Diet Library
  • Subject Heading...g--Congresses. Micromachining--Congresses. Optoelectronic d...

International symposium on photoelectronic detection and imaging 2011 : sensor and micromachined optical device technologies : 24-26 May 2011 : Beijing, China : 4th international symposium on photoelectronic detection and imaging : ISPDI 2011 : ISPDI2011 : May 2011, Beijing, China. (SPIE Proceedings ; 8191)

International symposium on photoelectronic detection and imaging 2011 : sensor and micromachined optical device technologies : 24-26 May 2011 : Beijing, China : 4th international symposium on photoelectronic detection and imaging : ISPDI 2011 : ISPDI2011 : May 2011, Beijing, China. (SPIE Proceedings ; 8191)
Paper図書
SPIEc2011.<M17-12-1566>
National Diet Library
  • Subject Heading...s--Congresses. Micromachining--Congresses. Image processing...

Laser-based micro- and nanopackaging and assembly 7 : 6-7 February 2013 : San Francisco, California, United States ; Synthesis and photonics of nanoscale materials 10 : 3-5 February 2013 : San Francisco, California, United States : LBMP conference : LASE 2013 : LBMP-7 : Feb 2013, San Francisco, CA. (SPIE Proceedings ; 8608-8609)

Laser-based micro- and nanopackaging and assembly 7 : 6-7 February 2013 : San Francisco, California, United States ; Synthesis and photonics of nanoscale materials 10 : 3-5 February 2013 : San Francisco, California, United States : LBMP conference : LASE 2013 : LBMP-7 : Feb 2013, San Francisco, CA. (SPIE Proceedings ; 8608-8609)
Paper図書
SPIEc2013.<M17-13-2680>
National Diet Library
  • Subject Heading...g--Congresses. Micromachining--Congresses. Micromechanics--...

Non-traditional micromachining processes : fundamentals and applications

Non-traditional micromachining processes : fundamentals and applications
Paper図書
Golam Kibria, B. Bhattacharyya, J. Paulo Davim, editorsSpringerc2017
Other Libraries in Japan
  • Subject HeadingMicromachining Manufacturing processes
  • Subject Heading (ID)Micromachining Manufacturing processes

Materials characterisation and mechanism of micro-cutting in ultra-precision diamond turning

Materials characterisation and mechanism of micro-cutting in ultra-precision diamond turning
Paper図書
Sandy Suet To, Hao Wang, Wing Bing LeeSpringerc2018
Other Libraries in Japan
  • Subject HeadingMicromachining Cutting Diamond turning
  • Subject Heading (ID)Micromachining Cutting Diamond turning

Laser-based micro- and nanopackaging and assembly 6 : 24-26 January 2012 : San Francisco, California, United States : LBMP conference : conference LBMP-6 : LASE : Jan 2012, San Francisco, CA. (SPIE Proceedings ; 8244)

Laser-based micro- and nanopackaging and assembly 6 : 24-26 January 2012 : San Francisco, California, United States : LBMP conference : conference LBMP-6 : LASE : Jan 2012, San Francisco, CA. (SPIE Proceedings ; 8244)
Paper図書
SPIEc2012.<M17-12-3563>
National Diet Library
  • Subject Heading...g--Congresses. Micromachining--Congresses. Micromechanics--...

MEMS, MOEMS, and micromachining 3 : 9-10 April 2008 : Strasbourg, France. : Apr 2008, Strasbourg, France. (SPIE Proceedings ; 6993)

MEMS, MOEMS, and micromachining 3 : 9-10 April 2008 : Strasbourg, France. : Apr 2008, Strasbourg, France. (SPIE Proceedings ; 6993)
Paper図書
SPIEc2008.<M17-08-1737>
National Diet LibraryOther Libraries in Japan
  • Subject Heading...-- Congresses. Micromachining -- Congresses.

Laser-based micro- and nanopackaging and assembly 5 : 25-27 January 2011 : San Francisco, California, United States. : LBMP conference : LBMP-5 conference : LASE 2011 : Jan 2011, San Francisco, CA. (SPIE Proceedings ; 7921)

Laser-based micro- and nanopackaging and assembly 5 : 25-27 January 2011 : San Francisco, California, United States. : LBMP conference : LBMP-5 conference : LASE 2011 : Jan 2011, San Francisco, CA. (SPIE Proceedings ; 7921)
Paper図書
SPIEc2011.<M17-11-2275>
National Diet Library
  • Subject Heading...-- Congresses. Micromachining -- Congresses. Micromechanics...

Micromachining and microfabrication process technology 18 : 5 and 7 February 2013 : San Francisco, California, United States : Feb 2013, San Francisco, CA. (SPIE Proceedings ; 8612)

Micromachining and microfabrication process technology 18 : 5 and 7 February 2013 : San Francisco, California, United States : Feb 2013, San Francisco, CA. (SPIE Proceedings ; 8612)
Paper図書
SPIEc2013.<M17-13-2957>
National Diet Library
  • Subject HeadingMicromachining--Congresses. Microfabrication...

Micromachining using electrochemical discharge phenomenon : fundamentals and application of spark assisted chemical engraving 2nd ed

Micromachining using electrochemical discharge phenomenon : fundamentals and application of spark assisted chemical engraving 2nd ed
Paper図書
Rolf Wuthrich, Jana D. Abou ZikiElsevierc2015
Other Libraries in Japan
  • Subject HeadingElectric metal-cutting Micromachining
  • Subject Heading (ID)Electric metal-cutting Micromachining

Laser-based micro- and nanopackaging and assembly 4 : 26-28 January 2010 : San Francisco, California, United States. : LBMP : conference LBMP-4 : LASE 2010 : Jan 2010, San Francisco, CA. (SPIE Proceedings ; 7585)

Laser-based micro- and nanopackaging and assembly 4 : 26-28 January 2010 : San Francisco, California, United States. : LBMP : conference LBMP-4 : LASE 2010 : Jan 2010, San Francisco, CA. (SPIE Proceedings ; 7585)
Paper図書
SPIEc2010.<M17-10-2654>
National Diet Library
  • Subject Heading...-- Congresses. Micromachining -- Congresses. Micromechanics...

Focused ion beams for materials characterization and micromachining : March 24-28, 2008 : San Francisco, California, USA. : Mar 2008, San Francisco, CA. (Materials Research Society Symposia Proceedings ; 1089)

Focused ion beams for materials characterization and micromachining : March 24-28, 2008 : San Francisco, California, USA. : Mar 2008, San Francisco, CA. (Materials Research Society Symposia Proceedings ; 1089)
Paper図書
Materials Research Societyc2008.<M17-09-2070>
National Diet Library
  • Subject Heading...-- Congresses. Micromachining -- Materials -- Congresses.