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シリコンマイクロ加工の基礎

シリコンマイクロ加工の基礎
Paper図書
M.エルベンスポーク, H.V.ヤンセン 著, 田畑修, 佐藤一雄 訳シュプリンガー・フェアラーク東京2001.12<ND371-G193>
National Diet LibraryOther Libraries in Japan
  • Note (General)原タイトル: Silicon micromachining
  • Additional TitleSilicon micromachining

Side airbag sensor in silicon micromachining SAE-1999-01-0757

Side airbag sensor in silicon micromachining SAE-1999-01-0757
Paper規格・テクニカルリポート類
Ullmann, D, Bischopink, G, Schofthaler, M, Schellin, R, Maihofer, B, Seibold, J, Marek, J1999<M-SAE-1999-01-0757>
National Diet Library

A precision yaw rate sensor in silicon micromachining SAE-980267

A precision yaw rate sensor in silicon micromachining SAE-980267
Paper規格・テクニカルリポート類
Lutz, M, Golderer, W, Gerstenmeier, J, Marek, J, Maihofer, B, Schubert, D1998<M-SAE-980267>
National Diet Library

Design tools and issues of silicon micromachined (MEMS) devices SAND981104C DE98 005696 CONF980810

Design tools and issues of silicon micromachined (MEMS) devices SAND981104C DE98 005696 CONF980810
Microform規格・テクニカルリポート類
Davies, B. R, Rodgers, M. S, Montague, S1998<LS-DE98/005696>
National Diet Library

Silicon micromachined resonant angular rate sensor

Silicon micromachined resonant angular rate sensor
PaperDigital博士論文障害者向け資料あり
崔在濬 [著]<UT51-98-T233>
Available onlineNational Diet Library

Precise silicon micromachining for microsensors and microactuators

Precise silicon micromachining for microsensors and microactuators
PaperDigital博士論文障害者向け資料あり
戸田理作 [著]<UT51-99-H585>
Available onlineNational Diet Library

A silicon micromachined sensor for shear stress measurements in aerodynamic flows AIAA-96-0422

A silicon micromachined sensor for shear stress measurements in aerodynamic flows AIAA-96-0422
Paper規格・テクニカルリポート類
Padmanabhan, A, Goldberg, H. D, Schmidt, M. A, Breuer, K. S1996<M-AIAA-96-0422>
National Diet Library

Silicon micromachined gas chromatography system for separating and detecting environmentally-sensitive pollutants AIAA-96-0423

Silicon micromachined gas chromatography system for separating and detecting environmentally-sensitive pollutants AIAA-96-0423
Paper規格・テクニカルリポート類
Kolesar, Edward S, Reston, Rocky R1996<M-AIAA-96-0423>
National Diet Library

Silicon Micromachined Sensors and Sensor Arrays for Shear-Stress Measurements in Aerodynamic Flows

Silicon Micromachined Sensors and Sensor Arrays for Shear-Stress Measurements in Aerodynamic Flows
Microform博士論文
Padmanabhan, Aravind.Massachusetts Institute of Technology1997.<LS-DIMIT-97-249>
National Diet Library

Measurement of the Mass Flow and Tangential Momentum Accommodation Coefficient in Silicon Micromachined Channels

Measurement of the Mass Flow and Tangential Momentum Accommodation Coefficient in Silicon Micromachined Channels
Microform博士論文
Arkilic, Errol Bernard.Massachusetts Institute of Technology1997.<LS-DIMIT-97-012>
National Diet Library

Terahertz spectroscopy of silicon micromachined three-dimensional photonic bandgap crystal IS-M-791 DE95 010233 CONF-94059315

Terahertz spectroscopy of silicon micromachined three-dimensional photonic bandgap crystal IS-M-791 DE95 010233 CONF-94059315
Microform規格・テクニカルリポート類
Oezbay, E, Michel, E, Tuttle, G, Biswas, R, Ho, K. M1995<LS-DE95/010233>
National Diet Library

Silicon micromachined resonators for sensor applications

Silicon micromachined resonators for sensor applications
PaperDigital博士論文障害者向け資料あり
Cabuz, Cleopatra [著]<UT51-94-X133>
Available onlineNational Diet Library

Silicon Micromachined Wafer-Bonded Valves

Silicon Micromachined Wafer-Bonded Valves
Microform博士論文
Huff, Michael Allan.Massachusetts Institute of Technology1993.<LS-DI-MIT-93-152>
National Diet Library

Silicon micromachining : pbk

Silicon micromachining : pbk
Paper図書
M. Elwenspoek and H.V. JansenCambridge University Press2004
Other Libraries in Japan
  • Subject HeadingSilicon Micromachining Etching
  • Subject Heading (ID)Silicon Micromachining Etching

Silicon micromachining

Silicon micromachining
Paper図書
M. Elwenspoek and H.V. JansenCambridge University Press1998
Other Libraries in Japan
  • Subject HeadingSilicon Micromachining Etching
  • Subject Heading (ID)Silicon Micromachining Etching

DESIGN TOOLS AND ISSUES OF SILICON MICROMACHINED (MEMS) DEVICES (SAND ; SAND-98-1104C)

DESIGN TOOLS AND ISSUES OF SILICON MICROMACHINED (MEMS) DEVICES (SAND ; SAND-98-1104C)
Paper図書
B. R. DAVIES//ET AL. (USDOE OFFICE OF FINANCIAL MANAGEMENT AND CONTROLLER, WASHINGTON, DC (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1998.
Other Libraries in Japan

TERAHERTZ SPECTROSCOPY OF SILICON MICROMACHINED THREE-DIMENSIONAL PHOTONIC BANDGAP CRYSTAL. (IS ; IS-M-791)

TERAHERTZ SPECTROSCOPY OF SILICON MICROMACHINED THREE-DIMENSIONAL PHOTONIC BANDGAP CRYSTAL. (IS ; IS-M-791)
Paper図書
OEZBAY, E.(et al.)Ames Laboratory(Ames Laboratory)1995.
Other Libraries in Japan

Silicon micromachined wafer-conded valves

Silicon micromachined wafer-conded valves
Microform図書
Huff, Michael AllanMassachusetts Institute of Technology1993
Other Libraries in Japan

SILICON MICROMACHINING BASED ON POROUS SILICON FORMATION (SAND ; SAND-91-0910C)

SILICON MICROMACHINING BASED ON POROUS SILICON FORMATION (SAND ; SAND-91-0910C)
Paper図書
KELLY, M.J.//GUILINGER,T.R.//STEVENSON,J.O.(SANDIA NATIONAL LABS.,ALBUQUERQUE, NM(UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1991.
Other Libraries in Japan

NEW APPLICATIONS OF SILICON MICROMACHINING. (ORNL ; ORNL/TM-10590)

NEW APPLICATIONS OF SILICON MICROMACHINING. (ORNL ; ORNL/TM-10590)
Paper図書
LAUF, R.J.(et al.)Oak Ridge National Laboratory(Oak Ridge National Laboratory)1988.
Other Libraries in Japan