Ultra clean technology

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Ultra clean technology

Call No. (NDL): Z15-698
Bibliographic ID of National Diet Library: 000000075628
Persistent ID (NDL): info:ndljp/pid/2384703

Volumes of this title

11(6)

11(5)

11(4)

11(3)

11(2)

Other 48 Records

Material type: 雑誌

Publisher: 半導体基盤技術研究会

Publication date: 1990-1999

Publication Frequency: 季刊

Material Format: Paper・Digital

Publication: 刊行終了

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Notes on use

Holding issue：: 1巻1号(1989) - 11巻6号(1999)

Volume Range：: 1巻1号(1989) - 11巻6号(1999)

Note (Suspension or discontinuance of Publication)：: 以後廃刊

Note (General)：: 本タイトル等は最新号による

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Paper Digital

Material Type: 雑誌
ISSN: 0917-0367
ISSN-L: 0917-0367
Title: Ultra clean technology
Title Transcription: Ultra clean technology
Author/Editor: 半導体基盤技術研究会編集委員会編
Author Heading: 半導体基盤技術研究会ハンドウタイキバンギジュツケンキュウカイ
Publication, Distribution, etc.: 東京 : 半導体基盤技術研究会
Publication Date: 1990-1999
Publication Date (W3CDTF): 1990
1999
Publication status: 刊行終了
Publication frequency: 季刊
Year and volume of publication: 1巻1号(1989) - 11巻6号(1999)
Note (Suspension or discontinuance of publication): 以後廃刊
Extent: 冊
Size: 30cm
Alternative Title: ウルトラクリーンテクノロジーウルトラクリーンテクノロジー
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZM35
Note (General): 本タイトル等は最新号による
Note (Article): 雑誌記事索引採録あり
Adopted period (Article): 国立国会図書館雑誌記事索引 8 (1) 1996.02～11 (6) 1999.12
Holding library: 国立国会図書館
Year and volume of holding: 1巻1号(1989) - 11巻6号(1999)
Call No.: Z15-698
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000075628
http://id.ndl.go.jp/bib/000000075628
National Bibliography No. (JPNO): 00081256
Cataloging Rule: Nippon Cataloguing Rules 1987 Revised Edition
Bibliographic Record Category (NDL): 131