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Ultra clean technology
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Ultra clean technology
- Call No. (NDL)
- Z15-698
- Bibliographic ID of National Diet Library
- 000000075628
- Persistent ID (NDL)
- info:ndljp/pid/2384703
Volumes of this title
Notes on use at the National Diet Library
Notes on use
Holding issue：
- 1巻1号(1989) - 11巻6号(1999)
Volume Range：
- 1巻1号(1989) - 11巻6号(1999)
Note (Suspension or discontinuance of Publication)：
- 以後廃刊
Note (General)：
- 本タイトル等は最新号による
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Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 雑誌
- ISSN
- 0917-0367
- ISSN-L
- 0917-0367
- Title Transcription
- Ultra clean technology
- Author/Editor
- 半導体基盤技術研究会編集委員会 編
- Author Heading
- 半導体基盤技術研究会 ハンドウタイ キバン ギジュツ ケンキュウカイ
- Publication, Distribution, etc.
- Publication Date
- 1990-1999
- Publication Date (W3CDTF)
- 19901999