Planarization CMP & its applications 16:2013

Planarization CMP & its applications

16:2013

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Material Type: 雑誌
電子資料
ISSN: 2187-8579
ISSN-L: 2187-8579
Title: Planarization CMP & its applications
Title Transcription: Planarization CMP & its applications
Volume: 16:2013
Author Heading: 精密工学会セイミツコウガッカイ ( 00299339 )Authorities
Publication, Distribution, etc.: 福岡 : 精密工学会「プラナリゼーションCMPとその応用技術専門委員会」
Publication Date: 2013
Publication Date (W3CDTF): 2013
Year and volume of publication: v. 15 (2013年版)-
Size: 12cm
Abbreviated Title: Planarization
Key Title: Planarization
Place of Publication (Country Code): JP
Text Language Code: jpn
eng
Note (Material Type): [電子資料]
Computer File Characteristics: テキスト・データ
Note (System Details): Windows 98SE以降 (v. 15による)
Windows 7/8以降 (v. 16による)
NDLC: ZN12
ZN33
Holding library: 国立国会図書館
Call No.: YH247-1327
Related Material: 関連資料
https://ndlsearch.ndl.go.jp/books/R100000002-I000000108334
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 024429068
http://id.ndl.go.jp/bib/024429068
National Bibliography No. (JPNO): 01034114
Cataloging Rule: Nippon Cataloguing Rules 1987 Revised Edition
Bibliographic Record Category (NDL): 144