プラズマCVDとイオン注入技術を用いた高密着ダイヤモンドライクカーボン膜の作製
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- Material Type
- 記事
- Author/Editor
- 渕上健児和住光一郎上松和夫
- Publication, Distribution, etc.
- Publication Date
- 2003-07
- Publication Date (W3CDTF)
- 2003-07
- Alternative Title
- Preparation of highly adhesive Diamond-Like Carbon films by plasma CVD combined with ion implantation
- Periodical title
- 石川島播磨技報
- No. or year of volume/issue
- 43(4)
- Volume
- 43(4)