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Thermal stability of fluorinated SiO(sub 2) films: Effects of hydration and film-substrate interaction SAND-97-1628C DE97 007141 CONF-961202120

Thermal stability of fluorinated SiO(sub 2) films: Effects of hydration and film-substrate interaction SAND-97-1628C DE97 007141 CONF-961202120
Microform規格・テクニカルリポート類
Sullivan, J. P, Barbour, J. C, Newcomer, P. P, Apblett, C. A, Seager, C. H1997<LS-DE97/007141>
National Diet Library

Composition analysis of ECR-grown SiO2 and SiOxFy films SAND-95-1425C DE95 014860 CONF-95051221

Composition analysis of ECR-grown SiO2 and SiOxFy films SAND-95-1425C DE95 014860 CONF-95051221
Microform規格・テクニカルリポート類
Burkhart, J. H, Denison, D, Barbour, J. C, Apblett, C. A1995<LS-DE95/014860>
National Diet Library

Characterization and electrical properties of copper films grown via direct liquid coinjection of (hfac)Cu(TMVS) and TMVS SAND-94-1716 DE95 002957

Characterization and electrical properties of copper films grown via direct liquid coinjection of (hfac)Cu(TMVS) and TMVS SAND-94-1716 DE95 002957
Microform規格・テクニカルリポート類
Parmeter, J. E, Petersn, G. A, Apblett, C. A, Smith, P. M1994<LS-DE95/002957>
National Diet Library

Copper CVD using liquid coinjection of (hfac)Cu(TMVS) and TMVS SAND-94-2544C DE95 008155 CONF-94101781

Copper CVD using liquid coinjection of (hfac)Cu(TMVS) and TMVS SAND-94-2544C DE95 008155 CONF-94101781
Microform規格・テクニカルリポート類
Custer, J. S, Petersen, G. A, Smith, P. M, Parmeter, J. E, Apblett, C. A1994<LS-DE95/008155>
National Diet Library

COMPOSITION ANALYSIS OF ECR-GROWN SIO/SUB 2/ AND SIO/SUB X/F/SUB Y/ FILMS (SAND ; SAND-95-1425C)

COMPOSITION ANALYSIS OF ECR-GROWN SIO/SUB 2/ AND SIO/SUB X/F/SUB Y/ FILMS (SAND ; SAND-95-1425C)
Paper図書
BURKHART, J.H.// DENISON, D.// BARBOUR, J.C.// APBLETT, C.A. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1995.
Other Libraries in Japan
  • Author HeadingBURKHART, J.H. DENISON, D. BARBOUR, J.C. APBLETT, C.A.

CHARACTERIZATION AND ELECTRICAL PROPERTIES OF COPPER FILMS GROWN VIA DIRECT LIQUID COINJECTION OF (HFAC)CU(TMVS) AND TMVS (SAND ; SAND-94-1716)

CHARACTERIZATION AND ELECTRICAL PROPERTIES OF COPPER FILMS GROWN VIA DIRECT LIQUID COINJECTION OF (HFAC)CU(TMVS) AND TMVS (SAND ; SAND-94-1716)
Paper図書
PARMETER, J.E.// PETERSN, G.A.// APBLETT, C.A.// SMITH, P.M. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1994.
Other Libraries in Japan
  • Author HeadingPARMETER, J.E. PETERSN, G.A. APBLETT, C.A. SMITH, P.M.

COPPER CVD USING LIQUID COINJECTION OF (HFAC)CU(TMVS) AND TMVS (SAND ; SAND-94-2544C)

COPPER CVD USING LIQUID COINJECTION OF (HFAC)CU(TMVS) AND TMVS (SAND ; SAND-94-2544C)
Paper図書
CUSTER, J.S.// PETERSEN, G.A.// SMITH, P.M.// PARMETER, J.E.// APBLETT, C.A.// NORMAN, J.A.T.// HOCHBERG, A.K.// ROBERTS, D.A. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1994.
Other Libraries in Japan
  • Author Heading...PARMETER, J.E. APBLETT, C.A. NORMAN, J.A.T. HOCHBERG, A.K....

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