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Electrothermal actuators fabricated in four-level planarized surface-miromachined polycrystalline silicon SAND-97-2533C DE98 000559 CONF-971088

Electrothermal actuators fabricated in four-level planarized surface-miromachined polycrystalline silicon SAND-97-2533C DE98 000559 CONF-971088
Microform規格・テクニカルリポート類
Comtois, J. H, Michalicek, A, Barron, C. C1997<LS-DE98/000559>
National Diet Library

Improved Design of Optical MEMS Using the SUMMiT Fabrication Process SAND-97-2997C DE98 001369 CONF-980514

Improved Design of Optical MEMS Using the SUMMiT Fabrication Process SAND-97-2997C DE98 001369 CONF-980514
Microform規格・テクニカルリポート類
Michalicek, M. A, Comtois, J. H, Barron, C. C1997<LS-DE98/001369>
National Diet Library

Design and Characterization of Next-Generation Micromirrors Fabricated in a Four-Level, Planarized Surface-Micromachined Polycrystalline Silicon Process SAND-97-2532C DE98 000384

Design and Characterization of Next-Generation Micromirrors Fabricated in a Four-Level, Planarized Surface-Micromachined Polycrystalline Silicon Process SAND-97-2532C DE98 000384
Microform規格・テクニカルリポート類
Michalicek, M. A, Comtois, J. H, Barron, C. C1997<LS-DE98/000384>
National Diet Library

Fabricating micro-instruments in surface-micromachined polycrystalline silicon SAND-97-0718C DE97 004034 CONF-9705462

Fabricating micro-instruments in surface-micromachined polycrystalline silicon SAND-97-0718C DE97 004034 CONF-9705462
Microform規格・テクニカルリポート類
Comtois, J. H, Michalicek, M. A, Barron, C. C1997<LS-DE97/004034>
National Diet Library

SAMPLE (Sandia Agile MEMS Prototyping, Layout tools, and Education) SAND-97-0734C DE97 007154 CONF-9709683

SAMPLE (Sandia Agile MEMS Prototyping, Layout tools, and Education) SAND-97-0734C DE97 007154 CONF-9709683
Microform規格・テクニカルリポート類
Davies, B. R, Barron, C. C, Sniegowski, J. J, Rodgers, M. S1997<LS-DE97/007154>
National Diet Library

Fabrication of large area gratings with sub-micron pitch using mold micromachining SAND-97-0331C DE97 003208 CONF-9702318

Fabrication of large area gratings with sub-micron pitch using mold micromachining SAND-97-0331C DE97 003208 CONF-9702318
Microform規格・テクニカルリポート類
Fleming, J. G, Barron, C. C, Stallard, B, Kaushik, S1997<LS-DE97/003208>
National Diet Library

Micromachined silicon seismic accelerometer development SAND-96-1895C DE96 013247 CONF-96091858

Micromachined silicon seismic accelerometer development SAND-96-1895C DE96 013247 CONF-96091858
Microform規格・テクニカルリポート類
Barron, C. C, Fleming, J. G, Montague, S1996<LS-DE96/013247>
National Diet Library

Advanced micromechanisms in a multi-level polysilicon technology SAND-97-1842C DE97 007909 CONF-9709682

Advanced micromechanisms in a multi-level polysilicon technology SAND-97-1842C DE97 007909 CONF-9709682
Microform規格・テクニカルリポート類
Rodgers, M. S, Sniegowski, J. J, Miller, S. L, Barron, C. C, McWhorter, P. J1997<LS-DE97/007909>
National Diet Library

Novel silicon fabrication process for high-aspect-ratio micromachined parts SAND-95-1885C DE95 016761 CONF-95101961

Novel silicon fabrication process for high-aspect-ratio micromachined parts SAND-95-1885C DE95 016761 CONF-95101961
Microform規格・テクニカルリポート類
Fleming, J. G, Barron, C. C1995<LS-DE95/016761>
National Diet Library

Integrated mold/surface-micromachining process SAND-96-0401C DE96 006470 CONF-9602684

Integrated mold/surface-micromachining process SAND-96-0401C DE96 006470 CONF-9602684
Microform規格・テクニカルリポート類
Barron, C. C, Fleming, J. G, Montague, S, Sniegowski, J. J, Hetherington, D. L1996<LS-DE96/006470>
National Diet Library

High G MEMS integrated accelerometer SAND-96-2075C DE97 004384 CONF-9703244

High G MEMS integrated accelerometer SAND-96-2075C DE97 004384 CONF-9703244
Microform規格・テクニカルリポート類
Davies, B. R, Barron, C. C, Montague, S, Smith, J. H, Murray, J. R1996<LS-DE97/004384>
National Diet Library

Micromachined silicon seismic transducers SAND-95-1793C DE95 016729 CONF-95092113

Micromachined silicon seismic transducers SAND-95-1793C DE95 016729 CONF-95092113
Microform規格・テクニカルリポート類
Barron, C. C, Fleming, J. G, Sniegowski, J. J, Armour, D. L, Fleming, R. P1995<LS-DE95/016729>
National Diet Library

Micromachined sensor and actuator research at the Microelectronics Development Laboratory SAND-94-2193C DE95 008540 CONF-9502284

Micromachined sensor and actuator research at the Microelectronics Development Laboratory SAND-94-2193C DE95 008540 CONF-9502284
Microform規格・テクニカルリポート類
Smith, J. H, Barron, C. C, Fleming, J. G, Montague, S, Rodriguez, J. L1994<LS-DE95/008540>
National Diet Library

MICROMACHINED SILICON SEISMIC ACCELEROMETER DEVELOPMENT (SAND ; SAND-96-1895C)

MICROMACHINED SILICON SEISMIC ACCELEROMETER DEVELOPMENT (SAND ; SAND-96-1895C)
Paper図書
BARRON, C.C.// FLEMING, J.G.// MONTAGUE, S. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1996.
Other Libraries in Japan
  • Author HeadingBARRON, C.C. FLEMING, J.G. MONTAGUE, S.

NOVEL SILICON FABRICATION PROCESS FOR HIGH-ASPECT-RATIO MICROMACHINED PARTS (SAND ; SAND-95-1885C)

NOVEL SILICON FABRICATION PROCESS FOR HIGH-ASPECT-RATIO MICROMACHINED PARTS (SAND ; SAND-95-1885C)
Paper図書
FLEMING, J.G.// BARRON, C.C. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1995.
Other Libraries in Japan
  • Author HeadingFLEMING, J.G. BARRON, C.C.

INTEGRATED MOLD/SURFACE-MICROMACHINING PROCESS (SAND ; SAND-96-0401C)

INTEGRATED MOLD/SURFACE-MICROMACHINING PROCESS (SAND ; SAND-96-0401C)
Paper図書
BARRON, C.C.// FLEMING, J.G.// MONTAGUE, S.// SNIEGOWSKI, J.J.// HETHERINGTON, D.L. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1996.
Other Libraries in Japan
  • Author HeadingBARRON, C.C. FLEMING, J.G. MONTAGUE, S. SN...

MICROMACHINED SILICON SEISMIC TRANSDUCERS (SAND ; SAND-95-1793C)

MICROMACHINED SILICON SEISMIC TRANSDUCERS (SAND ; SAND-95-1793C)
Paper図書
BARRON, C.C.// FLEMING, J.G.// SNIEGOWSKI, J.J.// ARMOUR, D.L.// FLEMING, R.P. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1995.
Other Libraries in Japan
  • Author HeadingBARRON, C.C. FLEMING, J.G. SNIEGOWSKI, J.J...

MICROMACHINED SENSOR AND ACTUATOR RESEARCH AT THE MICROELECTRONICS DEVELOPMENT LABORATORY (SAND ; SAND-94-2193C)

MICROMACHINED SENSOR AND ACTUATOR RESEARCH AT THE MICROELECTRONICS DEVELOPMENT LABORATORY (SAND ; SAND-94-2193C)
Paper図書
SMITH, J.H.// BARRON, C.C.// FLEMING, J.G.// MONTAGUE, S.// RODRIGUEZ, J.L.// SMITH, B.K.// SNIEGOWSKI, J.J. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1994.
Other Libraries in Japan
  • Author HeadingSMITH, J.H. BARRON, C.C. FLEMING, J.G. MONTAGUE, S. RO...

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