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Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nano-materials, and MEMS Second edition.

Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nano-materials, and MEMS Second edition.
Paper図書
edited by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera.William Andrew2012.<ND371-B75>
National Diet Library
  • Subject HeadingCathode sputtering (Plating process)--Handbooks, manuals, etc. Thi...

Thin film materials technology : sputtering of compound materials / by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi.

Thin film materials technology : sputtering of compound materials / by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi.
Paper図書
W. Andrew Pub.c2004.<ND371-B19>
National Diet Library
  • Subject HeadingCathode sputtering (Plating process) Thin films.

Sputtering materials for VLSI and thin film devices First edition.

Sputtering materials for VLSI and thin film devices First edition.
Paper図書
Jaydeep Sarkar.William Andrew2014.<ND371-B88>
National Diet Library
  • Subject HeadingMicroelectronics--Materials. Cathode sputtering (Plating process)--Materials. Integrated circui...

Thin film materials technology : sputtering of compound materials : William Andrew : Springer

Thin film materials technology : sputtering of compound materials : William Andrew : Springer
Paper図書
by Kiyotaka Wasa, Makoto Kitabatake, Hideaki AdachiWilliam Andrew Pub.c2004
Other Libraries in Japan
  • Subject HeadingCathode sputtering (Plating process) Thin films
  • Subject Heading (ID)Cathode sputtering (Plating process) Thin films

Pulsed and pulsed bias sputtering : principles and applications

Pulsed and pulsed bias sputtering : principles and applications
Paper図書
by Edward V. Barnat, Toh-Ming LuKluwer Academicc2003
Other Libraries in Japan
  • Subject HeadingCathode sputtering (Plating process) Thin films
  • Subject Heading (ID)Cathode sputtering (Plating process) Thin films

Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nanomaterials and MEMS 2nd ed

Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nanomaterials and MEMS 2nd ed
Paper図書
edited by Kiyotaka Wasa, Isaku Kanno, Hidetoshi KoteraElsevier/William Andrew2012
Other Libraries in Japan
  • Subject HeadingCathode sputtering (Plating process) -- Handbooks, manuals, etc Th...
  • Subject Heading (ID)Cathode sputtering (Plating process) -- Handbooks, manuals, etc Th...

Handbook of sputter deposition technology : principles, technology, and applications

Handbook of sputter deposition technology : principles, technology, and applications
Paper図書
by Kiyotaka Wasa and Shigeru HayakawaNoyes Publicationsc1992
Other Libraries in Japan
  • Subject HeadingCathode sputtering (Plating process) Thin films
  • Subject Heading (ID)Cathode sputtering (Plating process) Thin films

Vacuum technology, thin films, and sputtering : an introduction

Vacuum technology, thin films, and sputtering : an introduction
Paper図書
R.V. StuartAcademic Press1983
Other Libraries in Japan
  • Subject HeadingVacuum technology Thin films Cathode sputtering (Plating process)
  • Subject Heading (ID)Vacuum technology Thin films Cathode sputtering (Plating process)

IPAT 77 : proceedings [of a] conference [on] ion plating & allied techniques, Edinburgh, June, 1977

IPAT 77 : proceedings [of a] conference [on] ion plating & allied techniques, Edinburgh, June, 1977
Paper図書
[CEP Consultants Ltd][1977]
Other Libraries in Japan
  • Subject Heading... -- Congresses Cathode sputtering (Plating process) -- Congresses Thin films -- C...
  • Subject Heading (ID)... -- Congresses Cathode sputtering (Plating process) -- Congresses Thin films -- C...

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