Search results 14
Paper図書
National Diet Library
- Subject HeadingEUV / コヒーレントX線 / 高次高調波 / 超短パルスレーザー / EUVリソグラフィ / フェムト秒レーザー / 軟X線光学 / 干...
Paper図書
National Diet Library
- Subject HeadingX線顕微鏡 / EUVリソグラフィ / 欠陥検査 / 位相欠陥 / ミラウ干渉 /...
Paper図書
National Diet Library
- Subject Headingデブリフリー / EUV光源 / 同軸二重ノズル / Zピンチ / ガスカーテン /...
Paper図書
National Diet Library
- Subject Heading極端紫外線 / 超伝導トンネル接合素子 / 2次元アレイ / EUV / STJ
Paper図書
Other Libraries in Japan
- Subject Heading...ustizbarometer EUV Art. 7 EUV Einstweilige A......t EGMR Art. 19 EUV Europäische Gr......rlament Art. 2 EUV Europäisches Semester EU-Just...
- Subject Heading (ID)...ustizbarometer EUV Art. 7 EUV Einstweilige A......t EGMR Art. 19 EUV Europäische Gr......rlament Art. 2 EUV Europäisches Semester EU-Just...
Paper図書
National Diet LibraryOther Libraries in Japan
- Subject Heading...rrecht Europa AEUV EUV (Produktrabattgruppe)NG: NG-R...
Paper図書
National Diet Library
- Subject Heading...s. Lithography EUV
- Alternative TitleExtreme ultraviolet (EUV) lithography 5 : 24-27 Februa...
- Alternative TitleExtreme ultraviolet (EUV) lithography 5 : 24-27 Februa...
Paper図書
National Diet Library
- Subject Heading...ses. Metrology EUV optics
- Alternative Title... for x-ray and EUV optics 5 : 18 August 2014 : S...
- Alternative Title... for x-ray and EUV optics 5 : 18 August 2014 : S...
Paper図書
Other Libraries in Japan
- Subject Heading...che Verfassung EUV Reform der EU EU-Außenpolitik...
- Subject Heading (ID)...che Verfassung EUV Reform der EU EU-Außenpolitik...
Paper図書
National Diet Library
- Subject Heading...et lithography EUV
Digital文書・図像類
Other Libraries in Japan
- Subject HeadingEUV Plasmasphere He ion 30.4 nm
- Note (General)...探査機に搭載される極端紫外光(EUV)撮像装置PHOENIX(Pl......)なものとなる.超小型探査機にEUV撮像器を搭載する際に特に問題と......う集光能力の低下である.また,EUV領域の光を透過する窓材は存在し......基に,超小型探査機に搭載可能なEUV撮像装置の光学系の最適化を図っ...... Ultra Violet (EUV) imaging devic......installing the EUV imager in the ......s light in the EUV range, the opt...... system of the EUV imaging device which can be m...
- Alternative TitleDevelopment of Ultra-small Imaging Device, PHOENIX, for Plasmaspheric EUV Radiation
Paper図書
Other Libraries in Japan
- Subject Heading...päischen Union EUV AEUV European Union European coope...
- Subject Heading (ID)...päischen Union EUV AEUV European Union European coope...
- Alternative TitleEUV, AEUV : mit Europäischer Grundrecht...
Paper図書
Other Libraries in Japan
- Toc / Article...マルチパターニング 3. 5 EUVリソグラフィ 3. 5. 1 EUVリソグラフィの特徴 3. 5. 2 露光装置 3. 5. 3...
- Subject Heading...ジスト / リソグラフィ / EUV / 回路パターン / マスク / マルチパターニング / ...
Digital博士論文
Available onlineOther Libraries in Japan
- Subject HeadingLithography multilayer EUV resist Atomic hydrogen
- Note (General)...解像性能実証||第3章 高性能EUV分子レジストの開発||第4章 原子状水素による低損傷コンタミ...
- Alternative TitleDevelopment of Extreme Ultraviolet (EUV) Lithography
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