yr 〜
yr

Search results 35

Advanced etch technology for nanopatterning IV : 23-25 February 2015 : San Jose, California, United States : SPIE etch conference : international symposium on advanced lithography : Feb 2015, San Jose, CA. (SPIE Proceedings ; 9428)

Advanced etch technology for nanopatterning IV : 23-25 February 2015 : San Jose, California, United States : SPIE etch conference : international symposium on advanced lithography : Feb 2015, San Jose, CA. (SPIE Proceedings ; 9428)
Paper図書
SPIE[2015]<M17-15-2754>
National Diet Library

Advanced etch technology for nanopatterning III : 24-25 February 2014 : San Jose, California, United States : conference advanced etch technology for nanopatterning 3 : SPIE advanced lithography symposium 2014 : Feb 2014, San Jose, CA. (SPIE Proceedings ; 9054)

Advanced etch technology for nanopatterning III : 24-25 February 2014 : San Jose, California, United States : conference advanced etch technology for nanopatterning 3 : SPIE advanced lithography symposium 2014 : Feb 2014, San Jose, CA. (SPIE Proceedings ; 9054)
Paper図書
SPIE[2014]<M17-14-2844>
National Diet Library

Optical lithography : here is why 2nd ed

Optical lithography : here is why 2nd ed
Paper図書
Burn J. LinSPIE Pressc2021
Other Libraries in Japan
  • Subject HeadingMicrolithography Semiconductors -- Etching Lasers -- Industrial applicat...
  • Subject Heading (ID)Microlithography Semiconductors -- Etching Lasers -- Industrial applicat...

Nanofabrication : principles to laboratory practice : hbk

Nanofabrication : principles to laboratory practice : hbk
Paper図書
Andrew SaranganCRC Pressc2017
Other Libraries in Japan
  • Subject Heading...d construction Semiconductors -- Etching Nanoelectronics -- Experiment...
  • Subject Heading (ID)...d construction Semiconductors -- Etching Nanoelectronics -- Experiment...

Proceedings of the Fifth Symposium on Plasma Processing / edited by G.S. Mathad, G.C. Schwartz, G. Smolinsky. (Proceedings)

Proceedings of the Fifth Symposium on Plasma Processing / edited by G.S. Mathad, G.C. Schwartz, G. Smolinsky. (Proceedings)
Paper図書
Dielectrics and Insulation and Electronics Divisions, Electrochemical Societyc1985.<M15-A1400>
National Diet Library
  • Subject HeadingPlasma etching -- Congresses. Semiconductors -- Etching -- Congresses.

Plasma processes for semiconductor fabrication : hardback : pbk

Plasma processes for semiconductor fabrication : hardback : pbk
Paper図書
W.N.G. HitchonCambridge University Press1999
Other Libraries in Japan
  • Subject HeadingSemiconductors -- Etching Plasma etching
  • Subject Heading (ID)Semiconductors -- Etching Plasma etching

Lithography process control softcover

Lithography process control softcover
Paper図書
Harry J. LevinsonSPIE Optical Engineering Pressc1999
Other Libraries in Japan
  • Subject HeadingSemiconductors -- Etching Microlithography -- Quality c...
  • Subject Heading (ID)Semiconductors -- Etching Microlithography -- Quality c...

Plasma etching : fundamentals and applications

Plasma etching : fundamentals and applications
Paper図書
M. Sugawara ; with contributions from Barry L. Stansfield ... [et al.]Oxford University Press1998
Other Libraries in Japan
  • Subject HeadingSemiconductors -- Etching Plasma etching
  • Subject Heading (ID)Semiconductors -- Etching Plasma etching

Laser assisted deposition, etching, and doping : January 26-27, 1984, Los Angeles, California / Susan D. Allen, chairman/editor. (Proceedings of SPIE--the International Society for Optical Engineering ; v. 459)

Laser assisted deposition, etching, and doping : January 26-27, 1984, Los Angeles, California / Susan D. Allen, chairman/editor. (Proceedings of SPIE--the International Society for Optical Engineering ; v. 459)
Paper図書
SPIE--the International Society for Optical Engineeringc1984.<M15-A4745>
National Diet Library
  • Subject Heading...-- Congresses. Semiconductors -- Etching -- Congresses. Semiconductor ...

Plasma processing of semiconductors

Plasma processing of semiconductors
Paper図書
edited by P.F. WilliamsKluwerc1997
Other Libraries in Japan
  • Subject HeadingPlasma engineering Semiconductors -- Etching Plasma etching -- Industrial ...
  • Subject Heading (ID)Plasma engineering Semiconductors -- Etching Plasma etching -- Industrial ...

Computational lithography cloth

Computational lithography cloth
Paper図書
Xu Ma and Gonzalo R. ArceWileyc2010
Other Libraries in Japan
  • Subject Heading...-- Mathematics Semiconductors -- Etching -- Mathematics Resolution (Op...
  • Subject Heading (ID)...-- Mathematics Semiconductors -- Etching -- Mathematics Resolution (Op...

Etching of III-V semiconductors : an electrochemical approach

Etching of III-V semiconductors : an electrochemical approach
Paper図書
P.H.L. Notten, J.E.A.M. van den Meerakker, J.J. KellyElsevier Advanced Technologyc1991
Other Libraries in Japan
  • Subject HeadingSemiconductors -- Etching Electrochemistry
  • Subject Heading (ID)Semiconductors -- Etching Electrochemistry

Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions

Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions
Paper図書
edited by Stephen M. Rossnagel, Jerome J. Cuomo, William D. WestwoodNoyes Publicationsc1990
Other Libraries in Japan
  • Subject HeadingPlasma engineering Semiconductors -- Etching Plasma etching
  • Subject Heading (ID)Plasma engineering Semiconductors -- Etching Plasma etching

Proceedings of the Symposium on Etching for Pattern Definition / edited by Henry G. Hughes, Myron J. Rand.

Proceedings of the Symposium on Etching for Pattern Definition / edited by Henry G. Hughes, Myron J. Rand.
Paper図書
Dielectrics and Insulation and Electronics Divisions, Electrochemical Societyc1976.<ND371-62>
National Diet Library
  • Subject HeadingSemiconductors -- Etching -- Congresses. Integrated cir...

Dry etching for VLSI

Dry etching for VLSI
Paper図書
A.J. van Roosmalen, J.A.G. Baggerman, and S.J.H. BraderPlenum Pressc1991
Other Libraries in Japan
  • Subject HeadingSemiconductors -- Etching Integrated circuits -- Very l...
  • Subject Heading (ID)Semiconductors -- Etching Integrated circuits -- Very l...

Plasma etching in semiconductor fabrication

Plasma etching in semiconductor fabrication
Paper図書
Russ A. MorganElsevierc1985
Other Libraries in Japan
  • Subject HeadingSemiconductors -- Etching Plasma etching
  • Subject Heading (ID)Semiconductors -- Etching Plasma etching

Lithography for semiconductor manufacturing : 19-21 May 1999, Edinburgh, Scotland

Lithography for semiconductor manufacturing : 19-21 May 1999, Edinburgh, Scotland
Paper図書
Chris A. Mack, Tom Stevenson, chairs/editors ; sponsored by EOS--European OPtical Society ... [et al.]SPIEc1999
Other Libraries in Japan
  • Subject Heading... -- Congresses Semiconductors -- Etching -- Congresses Microlithograph...
  • Subject Heading (ID)... -- Congresses Semiconductors -- Etching -- Congresses Microlithograph...

Dry etching for microelectronics

Dry etching for microelectronics
Paper図書
edited by Ronald A. PowellNorth-Holland1984
Other Libraries in Japan
  • Subject HeadingSemiconductors -- Etching Plasma etching
  • Subject Heading (ID)Semiconductors -- Etching Plasma etching

Applications of plasma processes to VLSI technology

Applications of plasma processes to VLSI technology
Paper図書
edited by Takuo Sugano ; translated by Hyo-gun KimWileyc1985
Other Libraries in Japan
  • Subject HeadingSemiconductors -- Etching Integrated circuits -- Very l...
  • Subject Heading (ID)Semiconductors -- Etching Integrated circuits -- Very l...

Proceedings of the Ninth Symposium on Plasma Processing

Proceedings of the Ninth Symposium on Plasma Processing
Paper図書
edited by G.S. Mathad, D.W. HessElectrochemical Societyc1992
Other Libraries in Japan
  • Subject HeadingSemiconductors -- Etching -- Congressses Plasma etching...
  • Subject Heading (ID)Semiconductors -- Etching -- Congressses Plasma etching...