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Advances in resist technology and processing II : March 11-12, 1985, Santa Clara, California / Larry F. Thompson, chairman/editor ; cooperating organization, the International Society for Hybrid Microelectronics. (Proceedings of SPIE--the International Society for Optical Engineering ; v. 539)

Advances in resist technology and processing II : March 11-12, 1985, Santa Clara, California / Larry F. Thompson, chairman/editor ; cooperating organization, the International Society for Hybrid Microelectronics. (Proceedings of SPIE--the International Society for Optical Engineering ; v. 539)
紙図書
SPIE--the International Society for Optical Engineeringc1985.<M15-A1317>
国立国会図書館
  • 著者標目Thompson, L. F., 1944- International Society for Hyb...

Materials for microlithography : radiation-sensitive polymers / L.F. Thompson, editor, C.G. Willson, editor, J.M.J. Fréchet, editor ; based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of Polymer Chemistry, at the 187th Meeting of the American Chemical Society, St. Louis, Missouri, April 8-13, 1984. (ACS symposium series)

Materials for microlithography : radiation-sensitive polymers / L.F. Thompson, editor, C.G. Willson, editor, J.M.J. Fréchet, editor ; based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of Polymer Chemistry, at the 187th Meeting of the American Chemical Society, St. Louis, Missouri, April 8-13, 1984. (ACS symposium series)
紙図書
The Society1984.<M15-A2628>
国立国会図書館全国の図書館
  • 著者標目Thompson, L. F., 1944- Willson, C. G. (C. Grant) , 1...

Introduction to microlithography : theory, materials, and processing / L.F. Thompson, editor, C.G. Willson, editor, M.J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983. (ACS symposium series)

Introduction to microlithography : theory, materials, and processing / L.F. Thompson, editor, C.G. Willson, editor, M.J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983. (ACS symposium series)
紙図書
The Society1983.<M15-A52>
国立国会図書館全国の図書館
  • 著者標目Thompson, L. F., 1944- Willson, C. G. (C. Grant) , 1...

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