Journal of Vacuum Science & Technology B 5(4)-5(6):1987.7/1987.8-1987.11/1987.12 Microelectronics Processing and Phenomena

Journal of Vacuum Science & Technology. B, Microelectronics Processing and Phenomena

5(4)-5(6):1987.7/1987.8-1987.11/1987.12

Publisher: Published for the American Vacuum Society by the American Institute of Physics

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Note (General)：: Description based on the latest issue"An Official Publication of the American Vacuum Society"

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Material Type: 雑誌
Title: Journal of Vacuum Science & Technology
Volume: B
5(4)-5(6):1987.7/1987.8-1987.11/1987.12
Part Title: Microelectronics Processing and Phenomena
Publication, Distribution, etc.: New York, N.Y. : Published for the American Vacuum Society by the American Institute of Physics
Publication Date: 1987
Publication Date (W3CDTF): 1987
ISSN (Periodical Title): 0734-211X
Place of Publication (Country Code): US
Text Language Code: eng
NDLC: ZM35
ZN33
Note (General): Description based on the latest issue
"An Official Publication of the American Vacuum Society"
Holding library: 国立国会図書館
Call No.: Z53-Y133
Replaces: 分割前
https://ndlsearch.ndl.go.jp/books/R100000002-I000000126556
Continues: 継続後 : Journal of Vacuum Science & Technology. B
https://ndlsearch.ndl.go.jp/books/R100000002-I000000156914
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000131403
http://id.ndl.go.jp/bib/000000131403
Cataloging Rule: National Diet Library Cataloging Rules for Serials