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Search results 11

2015 international conference on planarization/CMP technology : (ICPT 2015) : Chandler, Arizona, USA : 30 September-2 October : annual CAMP conference : Sep 2015, Chandler, AZ.

2015 international conference on planarization/CMP technology : (ICPT 2015) : Chandler, Arizona, USA : 30 September-2 October : annual CAMP conference : Sep 2015, Chandler, AZ.
Paper図書
IEEE[2015]<M17-17-1534>
National Diet Library
  • Subject HeadingChemical mechanical planarization--Congresses. Chemical mechanical planarization.

ICPT 2014 : proceedings of international conference on planarization/CMP technology 2014 : November 19-21, 2014 : Kobe International Conference Center : Kobe, Japan : 11th ICPT2014 : Nov 2014, Kobe, Japan.

ICPT 2014 : proceedings of international conference on planarization/CMP technology 2014 : November 19-21, 2014 : Kobe International Conference Center : Kobe, Japan : 11th ICPT2014 : Nov 2014, Kobe, Japan.
Paper図書
IEEE[2014]<M17-15-3218>
National Diet Library
  • Subject HeadingChemical mechanical planarization--Congresses. Chemical mechanical planarization.

2014 international conference on planarization/CMP technology : (ICPT 2014) : Kobe, Japan : 19-21 November 2014 : 11th ICPT2014 : Nov 2014, Kobe, Japan.

2014 international conference on planarization/CMP technology : (ICPT 2014) : Kobe, Japan : 19-21 November 2014 : 11th ICPT2014 : Nov 2014, Kobe, Japan.
Paper図書
IEEE[2014]<M17-16-1821>
National Diet Library
  • Subject HeadingChemical mechanical planarization--Congresses. Chemical mechanical planarization.

Evolutions in planarization: equipment, materials, techniques and applications : April 1-5, 2013 : San Francisco, California, USA : Apr 2013, San Francisco, CA. (Materials Research Society Symposia Proceedings ; 1560)

Evolutions in planarization: equipment, materials, techniques and applications : April 1-5, 2013 : San Francisco, California, USA : Apr 2013, San Francisco, CA. (Materials Research Society Symposia Proceedings ; 1560)
Paper図書
Cambridge University Press[2013]<M17-14-2569>
National Diet Library
  • Subject HeadingChemical mechanical planarization--Congresses. M......e--Congresses. Chemical mechanical planarization. Materials science. Planariza...

Advances in CMP/polishing technologies for the manufacture of electronic devices

Advances in CMP/polishing technologies for the manufacture of electronic devices
Paper図書
edited by Toshiro Doi, Ioan D. Marinescu, Syuhei Kurokawa.William Andrew2012.<NB55-B4>
National Diet Library
  • Subject HeadingGrinding and polishing. Chemical mechanical planarization. Electrolytic polishing.

Science and technology of chemical mechanical planarization (CMP) : symposium held April 14-16, 2009, San Francisco, California, U.S.A. : symposium E, "science and technology of chemical mechanical planarization (CMP)" : 2009 MRS spring meeting : Apr 2009, San Francisco, CA. (Materials Research Society Symposia Proceedings ; 1157)

Science and technology of chemical mechanical planarization (CMP) : symposium held April 14-16, 2009, San Francisco, California, U.S.A. : symposium E, "science and technology of chemical mechanical planarization (CMP)" : 2009 MRS spring meeting : Apr 2009, San Francisco, CA. (Materials Research Society Symposia Proceedings ; 1157)
Paper図書
Materials Research Societyc2010.<M17-10-3973>
National Diet Library
  • Subject HeadingChemical mechanical planarization -- Congresses. Semiconductors...

Advances in chemical mechanical planarization (CMP) 2nd ed

Advances in chemical mechanical planarization (CMP) 2nd ed
Paper図書
Edited by Suryadevara BabuWoodhead Pub. is an imprint of Elsevierc2022
Other Libraries in Japan
  • Subject HeadingChemical mechanical planarization Semiconductors -- Materials
  • Subject Heading (ID)Chemical mechanical planarization Semiconductors -- Materials

Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A. : MRS spring meeting : symposium C, "advances and challenges in chemical mechanical planarization" : Apr 2007, San Francisco, CA. (Materials Research Society Symposia Proceedings ; 991)

Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A. : MRS spring meeting : symposium C, "advances and challenges in chemical mechanical planarization" : Apr 2007, San Francisco, CA. (Materials Research Society Symposia Proceedings ; 991)
Paper図書
Materials Research Societyc2007.<M17-08-301>
National Diet Library
  • Subject Heading...-- Congresses. Chemical mechanical planarization -- Congresses.
  • Author Heading... Challenges in Chemical Mechanical Planarization" (2007 : San Francisco, Calif...

Advances in CMP/polishing technologies for the manufacture of electronic devices : hbk

Advances in CMP/polishing technologies for the manufacture of electronic devices : hbk
Paper図書
edited by Toshiro Doi, Ioan D. Marinescu, Syuhei KurokawaWilliam Andrew : Elsevier2012
Other Libraries in Japan
  • Subject HeadingGrinding and polishing Chemical mechanical planarization Electrolytic polishing
  • Subject Heading (ID)Grinding and polishing Chemical mechanical planarization Electrolytic polishing

半導体Chemical Mechanical Planarization(CMP)プロセスにおける新たな超音波技術の開発

半導体Chemical Mechanical Planarization(CMP)プロセスにおける新たな超音波技術の開発
Digital文書・図像類
清家, 善之, 森, 竜雄, 一野, 祐亮, 本多, 祐二, 疋田, 智美愛知工業大学2023-11総合技術研究所研究報告=Bulletin of Research Institute for Industrial Technology.25p.6-7
Other Libraries in Japan
  • Subject Heading半導体デバイス Chemical Mechanical Planarization(CMP) Post-CMPクリーニング 超音波振動体 ポリ...
  • Alternative Titleハンドウタイ Chemical Mechanical Planarization CMP プロセス ニオケル アラタナ チョウオンパ ギジュ...
  • Alternative Titleハンドウタイ Chemical Mechanical Planarization CMP プロセス ニオケル アラタナ チョウオンパ ギジュ...

Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A.

Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A.
Paper図書
editors, Gerfield Zwicker ... [et al.]Materials Research Societyc2007
Other Libraries in Japan
  • Subject HeadingMicroelectronics -- Materials -- Congresses Chemical mechanical planarization -- Congresses
  • Subject Heading (ID)Microelectronics -- Materials -- Congresses Chemical mechanical planarization -- Congresses
  • Note (General)... Challenges in Chemical Mechanical Planarization," held April 10-12 at the 200...

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