「"Ion beam lithography -- Congresses"」の検索結果 | NDLサーチ

検索結果 19 件

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Electron-beam, X-ray, and ion-beam techniques for submicrometer lithographies IV : March 14-15, 1985, Santa Clara, California / Phillip D. Blais, chairman/editor ; cooperating organization, the International Society for Hybrid Microelectronics. (Proceedings of SPIE--the International Society for Optical Engineering ; v. 537)

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SPIE--the International Society for Optical Engineeringc1985.<M15-A1319>

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件名...-- Congresses. Ion beam lithography -- Congresses.

Electron-beam, X-ray, and ion-beam techniques for submicrometer lithographies III : March 15-16, 1984, Santa Clara, California / Alfred Wagner, chairman/editor ; cooperating organization, the International Society for Hybrid Microelectronics. (Proceedings of SPIE--the International Society for Optical Engineering ; v. 471)

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SPIE--the International Society for Optical Engineeringc1984.<M15-A4747>

国立国会図書館

件名...-- Congresses. Ion beam lithography -- Congresses.

Electron-beam, X-ray, EUV, and ion-beam submicrometer lithographies for manufacturing VI : 11-13 March 1996, Santa Clara, California

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David E. Seeger, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SEMATECHSPIEc1996

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件名... -- Congresses Ion beam lithography -- Congresses
件名（識別子）... -- Congresses Ion beam lithography -- Congresses

Electron-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing IV : 28 February-1 March 1994, San Jose, California

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David O. Patterson, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials InternationalSPIEc1994

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件名... -- Congresses Ion beam lithography -- Congresses Semiconductors -- Etching -- ...
件名（識別子）... -- Congresses Ion beam lithography -- Congresses Semiconductors -- Etching -- ...

Electron-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing : 6-7 March 1991, San Jose, California

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Martin Peckerar, chair/editor ; sponsored and published by SPIE--the International Society for Optical EngineeringSPIEc1991

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件名... -- Congresses Ion beam lithography -- Congresses
件名（識別子）... -- Congresses Ion beam lithography -- Congresses

Electron-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing III : 1-2 March 1993, San Jose, California pbk.

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David O. Patterson, chair/editor ; sponsored and published by SPIE--the International Society for Optical EngineeringThe Societyc1993

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件名... -- Congresses Ion beam lithography -- Congresses Semiconductors -- Etching -- ...
件名（識別子）... -- Congresses Ion beam lithography -- Congresses Semiconductors -- Etching -- ...

Proceedings of the 36th International Symposium on Electron, Ion, and Photon Beams, 26-29 May 1992 The Peaboy Hotel, Orland, Glorida

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special editor for the proceedings, Randy KubenaPublished for the American Vacuum Society by the American Institute of Physics1992

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件名... -- Congresses Ion beam lithography -- Congresses X-ray lithography -- Congress...
件名（識別子）... -- Congresses Ion beam lithography -- Congresses X-ray lithography -- Congress...

Electron-beam, x-ray, and ion-beam submicrometer lithographies for manufacturing II : 8-9 March 1992, San Jose, California

紙図書

Martin Peckerar, chair/editor ; sponsored and published by SPIE--the International Society for Optical EngineeringSPIEc1992

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件名... -- Congresses Ion beam lithography -- Congresses Semiconductors -- Etching -- ...
件名（識別子）... -- Congresses Ion beam lithography -- Congresses Semiconductors -- Etching -- ...

Proceedings of the 35th International Symposium on Electron, Ion, and Photon Beams, 28-31 May 1991 Seattle Sheraton Hotel & Towers, Seattle, Washington special casebound ed.

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special editor for the proceedings, Jane ShawPublished for the American Vacuum Society by the American Institute of Physics1991

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件名... -- Congresses Ion beam lithography -- Congresses X-ray lithography -- Congress...
件名（識別子）... -- Congresses Ion beam lithography -- Congresses X-ray lithography -- Congress...

Dry processing for submicrometer lithography : 12-13 October 1989, Santa Clara, California

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James Bondur, Alan R. Reinberg, chairs/editors ; sponsored by SPIE--the International Society for Optical EngineeringThe Societyc1990

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件名... -- Congresses Ion beam lithography -- Congresses
件名（識別子）... -- Congresses Ion beam lithography -- Congresses

Electron-beam, X-ray, and ion-beam technology : submicrometer lithographies VIII : 1-3 March 1989, San Jose, California

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Arnold W. Yanof, chair/editor ; sponsored by SPIE--the International Society for Optical EngineeringSPIEc1989

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件名... -- Congresses Ion beam lithography -- Congresses
件名（識別子）... -- Congresses Ion beam lithography -- Congresses

Electron-beam, X-ray, and ion-beam technology : submicrometer lithographies VII : 2-4 March 1988, Santa Clara, California pbk.

紙図書

Arnold W. Yanof, chair/editor ; sponsored by SPIE-the International Society for Optical EngineeringThe Societyc1988

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件名... -- Congresses Ion beam lithography -- Congresses
件名（識別子）... -- Congresses Ion beam lithography -- Congresses

Electron-beam, x-ray, and ion-beam lithographies VI : [proceedings] 5-6 March 1987, Santa Clara, California pbk.

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Phillip D. Blais, chair/editor ; sponsored by SPIE--the International Society for Optical EngineeringThe Societyc1987

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件名... -- Congresses Ion beam lithography -- Congresses
件名（識別子）... -- Congresses Ion beam lithography -- Congresses

Electron-beam, x-ray & ion-beam techniques for submicrometer lithographies V : 11-12 March 1986, Santa Clara, California pbk.

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Phillip D. Blais, chairman/editorSPIE--the International Society for Optical Engineeringc1986

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件名... -- Congresses Ion beam lithography -- Congresses
件名（識別子）... -- Congresses Ion beam lithography -- Congresses

Electron-beam, X-ray, and ion-beam techniques for submicrometer lithographies IV : March 14-15, 1985, Santa Clara, California pbk.

紙図書

Philliip D. Blais, chairman/editor ; cooperating organization, the International Society for Hybrid MicroelectronicsSPIE--the International Society for Optical Engineeringc1985

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件名... -- Congresses Ion beam lithography -- Congresses
件名（識別子）... -- Congresses Ion beam lithography -- Congresses

Electron-beam, X-ray, and ion-beam techniques for submicrometer lithographies III : March 15-16, 1984, Santa Clara, California pbk.

紙図書

Alfred Wagner, chairman/editor ; cooperating organization, the International Society for Hybrid MicroelectronicsS.P.I.E.-- International Society for Optical Engineeringc1984

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件名... -- Congresses Ion beam lithography -- Congresses
件名（識別子）... -- Congresses Ion beam lithography -- Congresses

Sixteenth Symposium on Electron, Ion, and Photon Beam Technology , Dallas, Texas, May 26-29, 1981 : Abstracts

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[s.n.][1981]

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件名Electron beams -- Congresses Ion beam lithography -- Congresses Photon beams -- Congresses
件名（識別子）Electron beams -- Congresses Ion beam lithography -- Congresses Photon beams -- Congresses

Methods and materials in microelectronic technology

紙図書

edited by Joachim BargonPlenum Pressc1984

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件名... -- Congresses Ion beam lithography -- Congresses X-ray lithography -- Congress...
件名（識別子）... -- Congresses Ion beam lithography -- Congresses X-ray lithography -- Congress...

Fifth International Vacuum Congress proceedings issue

紙図書

editor, P. A. Redhead ; associated editor, G. Ehrlich ... [et al.] ; editorial board, R. W. Hoffman ... [et. al.] ; assistant to the editor, Jill BakerThe American Institute of Physicsc1972

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件名... -- Congresses Ion beam lithography -- Congresses X-ray lithography -- Congress...
件名（識別子）... -- Congresses Ion beam lithography -- Congresses X-ray lithography -- Congress...

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