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Thin teflon-like films for MEMS: Film properties and reliability studies SAND980109C DE98 003931 CONF980918

Thin teflon-like films for MEMS: Film properties and reliability studies SAND980109C DE98 003931 CONF980918
Microform規格・テクニカルリポート類
Smith, B. K, LaVigne, G, Sniegowski, J. J, Brown, C. D1998<LS-DE98/003931>
National Diet Library

Failure modes in surface micromachined microelectromechanical actuators SAND980382C DE98 003046

Failure modes in surface micromachined microelectromechanical actuators SAND980382C DE98 003046
Microform規格・テクニカルリポート類
Miller, S. L, Rodgers, M. S, LaVigne, G, Sniegowski, J. J, Clews, P1998<LS-DE98/003046>
National Diet Library

Performance tradeoffs for a surface micromachined microengine SAND-96-1958C DE96 014844 CONF-9610865

Performance tradeoffs for a surface micromachined microengine SAND-96-1958C DE96 014844 CONF-9610865
Microform規格・テクニカルリポート類
Miller, S. L, Sniegowski, J. J, LaVigne, G, McWhorter, P. J1996<LS-DE96/014844>
National Diet Library

Routes to failure in rotating MEMS devices experiencing sliding friction SAND-97-1734C DE97 007264 CONF-970968-6

Routes to failure in rotating MEMS devices experiencing sliding friction SAND-97-1734C DE97 007264 CONF-970968-6
Microform規格・テクニカルリポート類
Miller, S. L, LaVigne, G, Rodgers, M. S, Sniegowski, J. J, Waters, J. P1997<LS-DE97/007264>
National Diet Library

Thin teflon-like films for eliminating adhesion in released polysilicon microstructures SAND-96-2888C DE97 004623 CONF-9606464

Thin teflon-like films for eliminating adhesion in released polysilicon microstructures SAND-96-2888C DE97 004623 CONF-9606464
Microform規格・テクニカルリポート類
Smith, B. K, Sniegowski, J. J, LaVigne, G1996<LS-DE97/004623>
National Diet Library

Friction in surface micromachined microengines SAND-96-0374C DE96 006471 CONF-9602686

Friction in surface micromachined microengines SAND-96-0374C DE96 006471 CONF-9602686
Microform規格・テクニカルリポート類
Miller, S. L, Sniegowski, J. J, LaVigne, G, McWhorter, P. J1996<LS-DE96/006471>
National Diet Library

FRICTION IN SURFACE MICROMACHINED MICROENGINES (SAND ; SAND-96-0374C)

FRICTION IN SURFACE MICROMACHINED MICROENGINES (SAND ; SAND-96-0374C)
Paper図書
MILLER, S.L.// SNIEGOWSKI, J.J.// LAVIGNE, G.// MCWHORTER, P.J. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1996.
Other Libraries in Japan
  • Author HeadingMILLER, S.L. SNIEGOWSKI, J.J. LAVIGNE, G. MCWHORTER, P.J.

Dynamic effects of linkage joints in electrostatic microengines SAND-97-2821C DE98 004906 CONF-980430

Dynamic effects of linkage joints in electrostatic microengines SAND-97-2821C DE98 004906 CONF-980430
Microform規格・テクニカルリポート類
Allen, J. J, Miller, S. L, LaVigne, G. F1998<LS-DE98/004906>
National Diet Library

Designing and operating electrostatically driven microengines SAND980493C DE98 004108

Designing and operating electrostatically driven microengines SAND980493C DE98 004108
Microform規格・テクニカルリポート類
Rodgers, M. S, Sniegowski, J. J, Miller, S. L, LaVigne, G. F1998<LS-DE98/004108>
National Diet Library

Monolithic geared-mechanisms driven by a polysilicon surface-micromachined on-chip electrostatic microengine SAND-96-0094C DE96 010746 CONF-9606734

Monolithic geared-mechanisms driven by a polysilicon surface-micromachined on-chip electrostatic microengine SAND-96-0094C DE96 010746 CONF-9606734
Microform規格・テクニカルリポート類
Sniegowski, J. J, Miller, S. L, LaVigne, G. F, Rodgers, M. S, McWhorter, P. J1996<LS-DE96/010746>
National Diet Library

MONOLITHIC GEARED-MECHANISMS DRIVEN BY A POLYSILICON SURFACE- MICROMACHINED ON-CHIP ELECTROSTATIC MICROENGINE (SAND ; SAND-96-0094C)

MONOLITHIC GEARED-MECHANISMS DRIVEN BY A POLYSILICON SURFACE- MICROMACHINED ON-CHIP ELECTROSTATIC MICROENGINE (SAND ; SAND-96-0094C)
Paper図書
SNIEGOWSKI, J.J.// MILLER, S.L.// LAVIGNE, G.F.// RODGERS, M.S.// MCWHORTER, P.J. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1996.
Other Libraries in Japan
  • Author HeadingSNIEGOWSKI, J.J. MILLER, S.L. LAVIGNE, G.F. RODGERS, M.S. MCWHORTER, P....

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