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Manufacturing method for multi-layer polysilicon surface-micromachining technology SAND980067C DE98 002723 CONF980328

Manufacturing method for multi-layer polysilicon surface-micromachining technology SAND980067C DE98 002723 CONF980328
Microform規格・テクニカルリポート類
Sniegowski, J. J, Rodgers, M. S1998<LS-DE98/002723>
National Diet Library

5-level polysilicon surface micromachine technology: Application to complex mechanical systems SAND980095C DE98 004423 CONF980638

5-level polysilicon surface micromachine technology: Application to complex mechanical systems SAND980095C DE98 004423 CONF980638
Microform規格・テクニカルリポート類
Rodgers, M. S, Sniegowski, J. J1998<LS-DE98/004423>
National Diet Library

Manufacturing microsystems-on-a-chip with 5-level surface micromachining technology SAND981129C DE98 005722 CONF980810

Manufacturing microsystems-on-a-chip with 5-level surface micromachining technology SAND981129C DE98 005722 CONF980810
Microform規格・テクニカルリポート類
Sniegowski, J, Rodgers, M. S1998<LS-DE98/005722>
National Diet Library

Applying macro design tools to the design of MEMS accelerometers SAND972360C DE98 004107

Applying macro design tools to the design of MEMS accelerometers SAND972360C DE98 004107
Microform規格・テクニカルリポート類
Davies, B. R, Rodgers, M. S, Montague, S1998<LS-DE98/004107>
National Diet Library

Designing microelectromechanical systems-on-a-chip in a 5-level surface micromachine technology SAND980393C DE98 005710 CONF980810

Designing microelectromechanical systems-on-a-chip in a 5-level surface micromachine technology SAND980393C DE98 005710 CONF980810
Microform規格・テクニカルリポート類
Rodgers, M. S, Sniegowski, J. J1998<LS-DE98/005710>
National Diet Library

Failure modes in surface micromachined microelectromechanical actuators SAND980382C DE98 003046

Failure modes in surface micromachined microelectromechanical actuators SAND980382C DE98 003046
Microform規格・テクニカルリポート類
Miller, S. L, Rodgers, M. S, LaVigne, G, Sniegowski, J. J, Clews, P1998<LS-DE98/003046>
National Diet Library

Design tools and issues of silicon micromachined (MEMS) devices SAND981104C DE98 005696 CONF980810

Design tools and issues of silicon micromachined (MEMS) devices SAND981104C DE98 005696 CONF980810
Microform規格・テクニカルリポート類
Davies, B. R, Rodgers, M. S, Montague, S1998<LS-DE98/005696>
National Diet Library

Sandia Agile MEMS Prototyping, Layout Tools, Education and Services Program SAND980092C DE98 005708 CONF980810

Sandia Agile MEMS Prototyping, Layout Tools, Education and Services Program SAND980092C DE98 005708 CONF980810
Microform規格・テクニカルリポート類
Schriner, H, Davies, B, Sniegowski, J, Rodgers, M. S, Allen, J1998<LS-DE98/005708>
National Diet Library

Advanced micromechanisms in a multi-level polysilicon technology SAND-97-1842C DE97 007909 CONF-9709682

Advanced micromechanisms in a multi-level polysilicon technology SAND-97-1842C DE97 007909 CONF-9709682
Microform規格・テクニカルリポート類
Rodgers, M. S, Sniegowski, J. J, Miller, S. L, Barron, C. C, McWhorter, P. J1997<LS-DE97/007909>
National Diet Library

Designing and operating electrostatically driven microengines SAND980493C DE98 004108

Designing and operating electrostatically driven microengines SAND980493C DE98 004108
Microform規格・テクニカルリポート類
Rodgers, M. S, Sniegowski, J. J, Miller, S. L, LaVigne, G. F1998<LS-DE98/004108>
National Diet Library

SAMPLE (Sandia Agile MEMS Prototyping, Layout tools, and Education) SAND-97-0734C DE97 007154 CONF-9709683

SAMPLE (Sandia Agile MEMS Prototyping, Layout tools, and Education) SAND-97-0734C DE97 007154 CONF-9709683
Microform規格・テクニカルリポート類
Davies, B. R, Barron, C. C, Sniegowski, J. J, Rodgers, M. S1997<LS-DE97/007154>
National Diet Library

Microelectro-optical devices in a 5-level polysilicon surface micromachining technology SAND981800C DE98 006148

Microelectro-optical devices in a 5-level polysilicon surface micromachining technology SAND981800C DE98 006148
Microform規格・テクニカルリポート類
Smith, J. H, Rodgers, M. S, Sniegowski, J. J, Miller, S. L, Hetherington, D1998<LS-DE98/006148>
National Diet Library

Integration of surface micromachined devices with optoelectronics: Technology and applications SAND980913C DE98 004951 CONF980720

Integration of surface micromachined devices with optoelectronics: Technology and applications SAND980913C DE98 004951 CONF980720
Microform規格・テクニカルリポート類
Warren, M. E, Blum, O, Sullivan, C. T, Shul, R. J, Rodgers, M. S1998<LS-DE98/004951>
National Diet Library

Routes to failure in rotating MEMS devices experiencing sliding friction SAND-97-1734C DE97 007264 CONF-970968-6

Routes to failure in rotating MEMS devices experiencing sliding friction SAND-97-1734C DE97 007264 CONF-970968-6
Microform規格・テクニカルリポート類
Miller, S. L, LaVigne, G, Rodgers, M. S, Sniegowski, J. J, Waters, J. P1997<LS-DE97/007264>
National Diet Library

Monolithic geared-mechanisms driven by a polysilicon surface-micromachined on-chip electrostatic microengine SAND-96-0094C DE96 010746 CONF-9606734

Monolithic geared-mechanisms driven by a polysilicon surface-micromachined on-chip electrostatic microengine SAND-96-0094C DE96 010746 CONF-9606734
Microform規格・テクニカルリポート類
Sniegowski, J. J, Miller, S. L, LaVigne, G. F, Rodgers, M. S, McWhorter, P. J1996<LS-DE96/010746>
National Diet Library

MONOLITHIC GEARED-MECHANISMS DRIVEN BY A POLYSILICON SURFACE- MICROMACHINED ON-CHIP ELECTROSTATIC MICROENGINE (SAND ; SAND-96-0094C)

MONOLITHIC GEARED-MECHANISMS DRIVEN BY A POLYSILICON SURFACE- MICROMACHINED ON-CHIP ELECTROSTATIC MICROENGINE (SAND ; SAND-96-0094C)
Paper図書
SNIEGOWSKI, J.J.// MILLER, S.L.// LAVIGNE, G.F.// RODGERS, M.S.// MCWHORTER, P.J. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1996.
Other Libraries in Japan
  • Author HeadingSNIEGOWSKI, J.J. MILLER, S.L. LAVIGNE, G.F. RODGERS, M.S. MCWHORTER, P.J.

THIN-FILM DECOUPLING CAPACITORS FOR MULTI-CHIP MODULES (SAND ; SAND-94-0163C)

THIN-FILM DECOUPLING CAPACITORS FOR MULTI-CHIP MODULES (SAND ; SAND-94-0163C)
Paper図書
DIMOS, D.// LOCKWOOD, S.J.// SCHWARTZ, R.W.// RODGERS, M.S. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1994.
Other Libraries in Japan
  • Author HeadingDIMOS, D. LOCKWOOD, S.J. SCHWARTZ, R.W. RODGERS, M.S.

ASPECTS OF FATIGUE AND RAPID DEPOLARIZATION IN THE FILM PZT CAPACITORS (SAND ; SAND-91-0237C)

ASPECTS OF FATIGUE AND RAPID DEPOLARIZATION IN THE FILM PZT CAPACITORS (SAND ; SAND-91-0237C)
Paper図書
NASBY, R.D.// SCHWANK, J.R.// RODGERS, M.S.// MILLER, S.L. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED SATES))Sandia National Laboratories(Sandia National Laboratories)1991.
Other Libraries in Japan
  • Author HeadingNASBY, R.D. SCHWANK, J.R. RODGERS, M.S. MILLER, S.L.

The response of metal-oxide-semiconductor devices irradiated at high temperatures (SAND ; SAND-88-1860C; CONF-890103-6; DE89005605)

The response of metal-oxide-semiconductor devices irradiated at high temperatures (SAND ; SAND-88-1860C; CONF-890103-6; DE89005605)
Paper図書
Schwank, J.R., Sexton, F.W., Fleetwood, D.M. [et al.]Sandia National Labs.1989.1.
Other Libraries in Japan
  • Author HeadingSchwank, J.R. Sexton, F.W. Fleetwood, D.M. Rodgers, M.S. Hughes, K.L.

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