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Micromachined louver arrays for spacecraft thermal control radiators AIAA-2001-0215

Micromachined louver arrays for spacecraft thermal control radiators AIAA-2001-0215
Paper規格・テクニカルリポート類
Osiander, R, Champion, J. L, Darrin, A. M, Sniegowski, J. J, Rodgers, S. M, Douglas, D, Swanson, T. D2001<M-AIAA-2001-0215>
National Diet Library

5-level polysilicon surface micromachine technology: Application to complex mechanical systems SAND980095C DE98 004423 CONF980638

5-level polysilicon surface micromachine technology: Application to complex mechanical systems SAND980095C DE98 004423 CONF980638
Microform規格・テクニカルリポート類
Rodgers, M. S, Sniegowski, J. J1998<LS-DE98/004423>
National Diet Library

Manufacturing method for multi-layer polysilicon surface-micromachining technology SAND980067C DE98 002723 CONF980328

Manufacturing method for multi-layer polysilicon surface-micromachining technology SAND980067C DE98 002723 CONF980328
Microform規格・テクニカルリポート類
Sniegowski, J. J, Rodgers, M. S1998<LS-DE98/002723>
National Diet Library

MEMS: A new approach to micro-optics SAND972641C DE98 004024

MEMS: A new approach to micro-optics SAND972641C DE98 004024
Microform規格・テクニカルリポート類
Sniegowski, J. J1997<LS-DE98/004024>
National Diet Library

Macrodesign for microdevices: Polysilicon surface-micromachining technology, applications and issues SAND-97-0976C DE97 005380 CONF-97046914

Macrodesign for microdevices: Polysilicon surface-micromachining technology, applications and issues SAND-97-0976C DE97 005380 CONF-97046914
Microform規格・テクニカルリポート類
Sniegowski, J. J1997<LS-DE97/005380>
National Diet Library

Designing microelectromechanical systems-on-a-chip in a 5-level surface micromachine technology SAND980393C DE98 005710 CONF980810

Designing microelectromechanical systems-on-a-chip in a 5-level surface micromachine technology SAND980393C DE98 005710 CONF980810
Microform規格・テクニカルリポート類
Rodgers, M. S, Sniegowski, J. J1998<LS-DE98/005710>
National Diet Library

Failure modes in surface micromachined microelectromechanical actuators SAND980382C DE98 003046

Failure modes in surface micromachined microelectromechanical actuators SAND980382C DE98 003046
Microform規格・テクニカルリポート類
Miller, S. L, Rodgers, M. S, LaVigne, G, Sniegowski, J. J, Clews, P1998<LS-DE98/003046>
National Diet Library

Thin teflon-like films for MEMS: Film properties and reliability studies SAND980109C DE98 003931 CONF980918

Thin teflon-like films for MEMS: Film properties and reliability studies SAND980109C DE98 003931 CONF980918
Microform規格・テクニカルリポート類
Smith, B. K, LaVigne, G, Sniegowski, J. J, Brown, C. D1998<LS-DE98/003931>
National Diet Library

Chemical-mechanical polishing: Enhancing the manufacturability of MEMS SAND-96-2028C DE96 014843 CONF-9610866

Chemical-mechanical polishing: Enhancing the manufacturability of MEMS SAND-96-2028C DE96 014843 CONF-9610866
Microform規格・テクニカルリポート類
Sniegowski, J. J1996<LS-DE96/014843>
National Diet Library

Surface micromachined sensors and actuators SAND-95-1892C DE95 016733 CONF-95102041

Surface micromachined sensors and actuators SAND-95-1892C DE95 016733 CONF-95102041
Microform規格・テクニカルリポート類
Sniegowski, J. J1995<LS-DE95/016733>
National Diet Library

Designing and operating electrostatically driven microengines SAND980493C DE98 004108

Designing and operating electrostatically driven microengines SAND980493C DE98 004108
Microform規格・テクニカルリポート類
Rodgers, M. S, Sniegowski, J. J, Miller, S. L, LaVigne, G. F1998<LS-DE98/004108>
National Diet Library

Micromachining technology for advanced weapon systems SAND-96-1934C DE97 001878 CONF-9703294

Micromachining technology for advanced weapon systems SAND-96-1934C DE97 001878 CONF-9703294
Microform規格・テクニカルリポート類
Sniegowski, J. J1996<LS-DE97/001878>
National Diet Library

Thin teflon-like films for eliminating adhesion in released polysilicon microstructures SAND-96-2888C DE97 004623 CONF-9606464

Thin teflon-like films for eliminating adhesion in released polysilicon microstructures SAND-96-2888C DE97 004623 CONF-9606464
Microform規格・テクニカルリポート類
Smith, B. K, Sniegowski, J. J, LaVigne, G1996<LS-DE97/004623>
National Diet Library

Performance tradeoffs for a surface micromachined microengine SAND-96-1958C DE96 014844 CONF-9610865

Performance tradeoffs for a surface micromachined microengine SAND-96-1958C DE96 014844 CONF-9610865
Microform規格・テクニカルリポート類
Miller, S. L, Sniegowski, J. J, LaVigne, G, McWhorter, P. J1996<LS-DE96/014844>
National Diet Library

Microelectro-optical devices in a 5-level polysilicon surface micromachining technology SAND981800C DE98 006148

Microelectro-optical devices in a 5-level polysilicon surface micromachining technology SAND981800C DE98 006148
Microform規格・テクニカルリポート類
Smith, J. H, Rodgers, M. S, Sniegowski, J. J, Miller, S. L, Hetherington, D1998<LS-DE98/006148>
National Diet Library

Surface micromachined microengine as the driver for micromechanical gears SAND-95-0851C DE95 011881 CONF-9506502

Surface micromachined microengine as the driver for micromechanical gears SAND-95-0851C DE95 011881 CONF-9506502
Microform規格・テクニカルリポート類
Garcia, E. J, Sniegowski, J. J1995<LS-DE95/011881>
National Diet Library

SAMPLE (Sandia Agile MEMS Prototyping, Layout tools, and Education) SAND-97-0734C DE97 007154 CONF-9709683

SAMPLE (Sandia Agile MEMS Prototyping, Layout tools, and Education) SAND-97-0734C DE97 007154 CONF-9709683
Microform規格・テクニカルリポート類
Davies, B. R, Barron, C. C, Sniegowski, J. J, Rodgers, M. S1997<LS-DE97/007154>
National Diet Library

Advanced micromechanisms in a multi-level polysilicon technology SAND-97-1842C DE97 007909 CONF-9709682

Advanced micromechanisms in a multi-level polysilicon technology SAND-97-1842C DE97 007909 CONF-9709682
Microform規格・テクニカルリポート類
Rodgers, M. S, Sniegowski, J. J, Miller, S. L, Barron, C. C, McWhorter, P. J1997<LS-DE97/007909>
National Diet Library

Novel method to characterize the elastic/plastic deformation response of thin films SAND-96-1794 DE97 000569

Novel method to characterize the elastic/plastic deformation response of thin films SAND-96-1794 DE97 000569
Microform規格・テクニカルリポート類
Bourcier, R. J, Sniegowski, J. J, Porter, V. L1996<LS-DE97/000569>
National Diet Library

Application of mechanical leverage to microactuation SAND-94-3205C DE95 011883 CONF-9506501

Application of mechanical leverage to microactuation SAND-94-3205C DE95 011883 CONF-9506501
Microform規格・テクニカルリポート類
Sniegowski, J. J, Smith, C1994<LS-DE95/011883>
National Diet Library
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