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Handbook of silicon based MEMS materials and technologies Second edition. (Micro & nano technologies series)

Handbook of silicon based MEMS materials and technologies Second edition. (Micro & nano technologies series)
紙図書
edited by Markku Tilli [and five others].William Andrew2015.<ND416-B81>
国立国会図書館

MEMS materials and processes handbook (MEMS reference shelf)

MEMS materials and processes handbook (MEMS reference shelf)
紙図書
Reza Ghodssi, Pinyen Lin, editors.Springerc2011.<ND416-B42>
国立国会図書館全国の図書館

Passive and electromechanical materials and integration : March 24-28, 2008 : San Francisco, California, USA. : Mar 2008, San Francisco, CA. (Materials Research Society Symposia Proceedings ; 1075)

Passive and electromechanical materials and integration : March 24-28, 2008 : San Francisco, California, USA. : Mar 2008, San Francisco, CA. (Materials Research Society Symposia Proceedings ; 1075)
紙図書
Materials Research Societyc2008.<M17-09-2042>
国立国会図書館
  • 件名Microelectromechanical systems -- Materials -- Congresses.

Microelectromechanical systems -- materials and devices : symposium held November 26-28, 2007, Boston, Massachusetts, U.S.A. : symposium DD, "microelectromechanical systems -- materials and devices" : 2007 MRS fall meeting : symposium N, "materials, integration and technology for monolithic instruments 2" : Nov 2007, Boston, MA. (Materials Research Society Symposia Proceedings ; 1052)

Microelectromechanical systems -- materials and devices : symposium held November 26-28, 2007, Boston, Massachusetts, U.S.A. : symposium DD, "microelectromechanical systems -- materials and devices" : 2007 MRS fall meeting : symposium N, "materials, integration and technology for monolithic instruments 2" : Nov 2007, Boston, MA. (Materials Research Society Symposia Proceedings ; 1052)
紙図書
Materials Research Societyc2008.<M17-08-1144>
国立国会図書館
  • 件名Microelectromechanical systems -- Materials -- Congresses. Microelectrome...
  • 著者標目...) Symposium on Microelectromechanical Systems -- Materials and Devices (2007 : Boston, M...

Microelectromechanical systems -- materials and devices 4 : symposium held November 29-December 3, Boston, Massachusetts, U.S.A. : symposium S, "microelectromechanical systems -- materials and devices 4" : Nov 2010, Boston, MA. (Materials Research Society Symposia Proceedings ; 1299)

Microelectromechanical systems -- materials and devices 4 : symposium held November 29-December 3, Boston, Massachusetts, U.S.A. : symposium S, "microelectromechanical systems -- materials and devices 4" : Nov 2010, Boston, MA. (Materials Research Society Symposia Proceedings ; 1299)
紙図書
Materials Research Society2011.<M17-12-1174>
国立国会図書館
  • 著者標目Symposium S, "Microelectromechanical Systems -- Materials and Devices IV" (2010 : Bosto...

Microelectromechanical systems -- materials and devices 3 : symposium held November 30-December 2, 2009, Boston, Massachusetts, U.S.A. : symposium DD, "microelectromechanical systems -- materials and devices 3" : 2009 MRS fall meeting : Nov 2009, Boston, MA. (Materials Research Society Symposia Proceedings ; 1222)

Microelectromechanical systems -- materials and devices 3 : symposium held November 30-December 2, 2009, Boston, Massachusetts, U.S.A. : symposium DD, "microelectromechanical systems -- materials and devices 3" : 2009 MRS fall meeting : Nov 2009, Boston, MA. (Materials Research Society Symposia Proceedings ; 1222)
紙図書
Materials Research Societyc2010.<M17-10-3898>
国立国会図書館
  • 件名Microelectromechanical systems -- Materials -- Congresses. Microelectrome...
  • 著者標目...Symposium DD, "Microelectromechanical Systems -- Materials and Devices III" (2009 : Bost...

Materials science of microelectromechanical systems (MEMS) devices 4 : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A. : 4th MRS MEMS symposium, "materials science of microelectromechanical systems (MEMS) devices 4" held at the 2001 MRS fall meeting : Nov 2001, Boston, MA. (Materials Research Society Symposia Proceedings ; 687)

Materials science of microelectromechanical systems (MEMS) devices 4 : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A. : 4th MRS MEMS symposium, "materials science of microelectromechanical systems (MEMS) devices 4" held at the 2001 MRS fall meeting : Nov 2001, Boston, MA. (Materials Research Society Symposia Proceedings ; 687)
紙図書
Materials Research Societyc2002.<M17-03-3783>
国立国会図書館
  • 件名Microelectromechanical systems -- Materials -- Congresses.

Microelectromechanical systems -- materials and devices 2 : symposium held December 1-2, 2008, Boston, Massachusetts, U.S.A. : symposium GG, "microelectromechanical systems -- materials and devices 2" : 2008 MRS fall meeting : Dec 2008, Boston, MA. (Materials Research Society Symposia Proceedings ; 1139)

Microelectromechanical systems -- materials and devices 2 : symposium held December 1-2, 2008, Boston, Massachusetts, U.S.A. : symposium GG, "microelectromechanical systems -- materials and devices 2" : 2008 MRS fall meeting : Dec 2008, Boston, MA. (Materials Research Society Symposia Proceedings ; 1139)
紙図書
Materials Research Societyc2009.<M17-10-472>
国立国会図書館
  • 件名Microelectromechanical systems -- Materials -- Congresses. Microelectrome...
  • 著者標目...Symposium GG, "Microelectromechanical Systems -- Materials and Devices II" (2008 : Bosto...

Materials science of microelectromechanical systems (MEMS) devices 3 : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A. : Symposium EE, "Materials Science of Microelectromechanical Systems (MEMS) Devices 3" : Nov 2000, Boston, MA. (Materials Research Society Symposia Proceedings ; 657)

Materials science of microelectromechanical systems (MEMS) devices 3 : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A. : Symposium EE, "Materials Science of Microelectromechanical Systems (MEMS) Devices 3" : Nov 2000, Boston, MA. (Materials Research Society Symposia Proceedings ; 657)
紙図書
Materials Research Societyc2001.<M17-03-2073>
国立国会図書館
  • 件名Microelectromechanical systems -- Materials -- Congresses.

Smart materials 5 : 10-12 December 2008 : Melbourne, Australia. : Dec 2008, Melbourne, Australia. (SPIE Proceedings ; 7267)

Smart materials 5 : 10-12 December 2008 : Melbourne, Australia. : Dec 2008, Melbourne, Australia. (SPIE Proceedings ; 7267)
紙図書
SPIEc2008.<M17-09-1350>
国立国会図書館全国の図書館
  • 件名...-- Congresses. Microelectromechanical systems -- Materials -- Congresses. Microactuators...

Smart materials 4 : 11-13 December 2006 : Adelaide, Australia. : conference smart materials 4 : SPIE international symposium on smart materials, nano- and micro-smart systems : Dec 2006, Adelaide, Australia. (SPIE Proceedings ; 6413)

Smart materials 4 : 11-13 December 2006 : Adelaide, Australia. : conference smart materials 4 : SPIE international symposium on smart materials, nano- and micro-smart systems : Dec 2006, Adelaide, Australia. (SPIE Proceedings ; 6413)
紙図書
SPIEc2007.<M17-07-985>
国立国会図書館
  • 件名...-- Congresses. Microelectromechanical systems -- Materials -- Congresses. Microactuators...

Silicon wet bulk micromachining for MEMS : hardcover

Silicon wet bulk micromachining for MEMS : hardcover
紙図書
Prem Pal, Kazuo SatoPan Stanford Publishingc2017
全国の図書館
  • 件名...anical systems Microelectromechanical systems -- Materials Silicon -- Electric propertie...
  • 件名（識別子）...anical systems Microelectromechanical systems -- Materials Silicon -- Electric propertie...

Smart materials, structures, and systems : 12-14 December 2002 : Bangalore, India. : ISSS-SPIE 2002 conference : Dec 2002, Bangalore, India. (SPIE Proceedings ; 5062)

Smart materials, structures, and systems : 12-14 December 2002 : Bangalore, India. : ISSS-SPIE 2002 conference : Dec 2002, Bangalore, India. (SPIE Proceedings ; 5062)
紙図書
SPIEc2003.<M17-04-944>
国立国会図書館
  • 件名...-- Congresses. Microelectromechanical systems -- Materials -- Congresses. Microactuators...

Handbook of silicon based MEMS materials and technologies 2nd ed

Handbook of silicon based MEMS materials and technologies 2nd ed
紙図書
edited by Markku Tilli...[et al.]William Andrew2015
全国の図書館
  • 件名...anical systems Microelectromechanical systems -- Materials Silicon -- Electric propertie...
  • 件名（識別子）...anical systems Microelectromechanical systems -- Materials Silicon -- Electric propertie...

Smart materials 2 : 16-18 December, 2002, Melbourne, Australia. : Dec 2002, Melbourne, Australia. (SPIE Proceedings ; 4934)

Smart materials 2 : 16-18 December, 2002, Melbourne, Australia. : Dec 2002, Melbourne, Australia. (SPIE Proceedings ; 4934)
紙図書
SPIEc2002.<M17-03-1068>
国立国会図書館
  • 件名...-- Congresses. Microelectromechanical systems -- Materials -- Congresses. Microactuators...

Magnetic materials, processes, and devices 6 : applications to storage and microelectromechanical systems (MEMS) : proceedings of the international symposium. : 6th international symposium on magnetic materials processes and devices with applications in storage and midro-elctro-mechanical systems (MEMS) : 198th meeting of the Electrochemical Society : Oct 2000, Phoenix, AZ. (PV ; 2000-29)

Magnetic materials, processes, and devices 6 : applications to storage and microelectromechanical systems (MEMS) : proceedings of the international symposium. : 6th international symposium on magnetic materials processes and devices with applications in storage and midro-elctro-mechanical systems (MEMS) : 198th meeting of the Electrochemical Society : Oct 2000, Phoenix, AZ. (PV ; 2000-29)
紙図書
Electrochemical Societyc2001.<M17-03-4972>
国立国会図書館
  • 件名...-- Congresses. Microelectromechanical systems -- Materials -- Congresses. Magnetic recor...

Handbook of silicon based MEMS : materials and technologies : hbk

Handbook of silicon based MEMS : materials and technologies : hbk
紙図書
by Veikko Lindroos ... [et al.]William Andrew2010
全国の図書館
  • 件名...anical systems Microelectromechanical systems -- Materials Silicon -- Electric propertie...
  • 件名（識別子）...anical systems Microelectromechanical systems -- Materials Silicon -- Electric propertie...

MEMS/NEMS nano technology : selected, peer reviewed papers from the 12th Annual Conference of the Chinese Society of Micro-Nano Technology and 2th [sic] International Conference of Chinese Society of Micro-Nano Technology, October 22-24, 2010, Xi'an, China

MEMS/NEMS nano technology : selected, peer reviewed papers from the 12th Annual Conference of the Chinese Society of Micro-Nano Technology and 2th [sic] International Conference of Chinese Society of Micro-Nano Technology, October 22-24, 2010, Xi'an, China
紙図書
edited by Xiaohao WangTrans Tech Publicationscop. 2011
全国の図書館
  • 件名... -- Congresses Microelectromechanical systems -- Materials -- Congresses Nanostructured ...
  • 件名（識別子）... -- Congresses Microelectromechanical systems -- Materials -- Congresses Nanostructured ...

Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, Boston, Massachusetts, U.S.A. : hard

Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, Boston, Massachusetts, U.S.A. : hard
紙図書
editors, Frank W. DelRio ... [et al.]Materials Research Society2011
全国の図書館
  • 件名Microelectromechanical systems -- Materials -- Congresses Microelectromec...
  • 件名（識別子）Microelectromechanical systems -- Materials -- Congresses Microelectromec...

Microelectromechanical systems--materials and devices III : symposium held November 30-December 2, 2009, Boston, Massachusetts, U.S.A.

Microelectromechanical systems--materials and devices III : symposium held November 30-December 2, 2009, Boston, Massachusetts, U.S.A.
紙図書
editors, Jörg Bagdahn ... [et al.]Materials Research Societyc2010
全国の図書館
  • 件名Microelectromechanical systems -- Materials -- Congresses Microelectromec...
  • 件名（識別子）Microelectromechanical systems -- Materials -- Congresses Microelectromec...
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