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3rd electronics system integration technology conference : (ESTC 2010) : Berlin, Germany : 13-16 September 2010. : Sep 2010, Berlin, Germany.

3rd electronics system integration technology conference : (ESTC 2010) : Berlin, Germany : 13-16 September 2010. : Sep 2010, Berlin, Germany.
Paper図書
IEEEc2010.<M17-11-1505>
National Diet Library
  • Author HeadingVDE/VDI. Society Microelectronics, Micro- and Precision Engineering (GMM)

27th European mask and lithography conference : 18-19 January 2011 : Dresden, Germany : EMLC 2011 : EMLC2011 : Jan 2011, Dresden, Germany. (SPIE Proceedings ; 7985)

27th European mask and lithography conference : 18-19 January 2011 : Dresden, Germany : EMLC 2011 : EMLC2011 : Jan 2011, Dresden, Germany. (SPIE Proceedings ; 7985)
Paper図書
SPIEc2011.<M17-12-179>
National Diet Library
  • Author Heading...ger, Uwe F. W. VDE/VDI. Society Microelectronics, Micro- and Precision Engineering (GMM)

26th European mask and lithography conference : 18-20 January 2010 : Grenoble, France. : EMLC 2010 : EMLC2010 : Jan 2010, Grenoble, France. (SPIE Proceedings ; 7545)

26th European mask and lithography conference : 18-20 January 2010 : Grenoble, France. : EMLC 2010 : EMLC2010 : Jan 2010, Grenoble, France. (SPIE Proceedings ; 7545)
Paper図書
SPIEc2010.<M17-10-3812>
National Diet Library
  • Author HeadingVDE/VDI. Society Microelectronics, Micro- and Precision Engineering (GMM) Behringer, Uwe F. W. Maurer, ...

25th European mask and lithography conference : 12-15 January 2009 : Dresden, Germany. : EMLC 2009 : EMLC2009 : Jan 2009, Dresden, Germany. (SPIE Proceedings ; 7470)

25th European mask and lithography conference : 12-15 January 2009 : Dresden, Germany. : EMLC 2009 : EMLC2009 : Jan 2009, Dresden, Germany. (SPIE Proceedings ; 7470)
Paper図書
SPIEc2009.<M17-10-505>
National Diet Library
  • Author HeadingVDE/VDI. Society Microelectronics, Micro- and Precision Engineering (GMM) Behringer, Uwe F. W. European...

EMLC 2005 : 21st European mask and lithography conference : 31 January-3 February 2005 : Dresden, Germany. : Jan 2005, Dresden, Germany. (SPIE Proceedings ; 5835)

EMLC 2005 : 21st European mask and lithography conference : 31 January-3 February 2005 : Dresden, Germany. : Jan 2005, Dresden, Germany. (SPIE Proceedings ; 5835)
Paper図書
SPIEc2005.<M17-05-2132>
National Diet Library
  • Author HeadingVDE/VDI. Society Microelectronics, Micro- and Precision Engineering (GMM) Forschungszentrum Karlsruhe. ...

EMLC 2008 : 24th European mask and lithography conference : 21-24 January 2008 : Dresden, Germany. : EMLC2008 : Jan 2008, Dresden, Germany. (SPIE Proceedings ; 6792)

EMLC 2008 : 24th European mask and lithography conference : 21-24 January 2008 : Dresden, Germany. : EMLC2008 : Jan 2008, Dresden, Germany. (SPIE Proceedings ; 6792)
Paper図書
SPIEc2008.<M17-08-1645>
National Diet LibraryOther Libraries in Japan
  • Author HeadingVDE/VDI. Society Microelectronics, Micro- and Precision Engineering (GMM) Behringer, Uwe F. W. Maurer, ...

EMLC 2007 : 23rd European mask and lithography conference : 22-25 January 2007 : Grenoble, France. : EMLC2007 : Jan 2007, Grenoble, France. (SPIE Proceedings ; 6533)

EMLC 2007 : 23rd European mask and lithography conference : 22-25 January 2007 : Grenoble, France. : EMLC2007 : Jan 2007, Grenoble, France. (SPIE Proceedings ; 6533)
Paper図書
SPIEc2007.<M17-07-1893>
National Diet LibraryOther Libraries in Japan
  • Author HeadingVDE/VDI. Society Microelectronics, Micro- and Precision Engineering (GMM) Behringer, Uwe F. W. Maurer, ...

EMLC 2006 : 22nd European mask and lithography conference : 23-26 January 2006 : Dresden, Germany. : EMLC2006 : Jan 2006, Dresden, Germany. (SPIE Proceedings ; 6281)

EMLC 2006 : 22nd European mask and lithography conference : 23-26 January 2006 : Dresden, Germany. : EMLC2006 : Jan 2006, Dresden, Germany. (SPIE Proceedings ; 6281)
Paper図書
SPIEc2006.<M17-06-2179>
National Diet Library
  • Author HeadingVDE/VDI. Society Microelectronics, Micro- and Precision Engineering (GMM) Behringer, Uwe F. W. European...

19th European conference on mask technology for integrated circuits and microcomponents : 13-15 January 2003 : Sonthofen, Germany. : Jan 2003, Sonthofen, Germany. (SPIE Proceedings ; 5148)

19th European conference on mask technology for integrated circuits and microcomponents : 13-15 January 2003 : Sonthofen, Germany. : Jan 2003, Sonthofen, Germany. (SPIE Proceedings ; 5148)
Paper図書
SPIEc2003.<M17-03-5330>
National Diet LibraryOther Libraries in Japan
  • Author HeadingVDE/VDI. Society Microelectronics, Micro- and Precision Engineering (GMM) Behringer, Uwe F W, Ed. Forsc...

20th European conference on mask technology for integrated circuits and microcomponents : 12-14 January 2004 : Dresden, Germany. : European mask conference (EMC) : Jan 2004, Dresden, Germany. (SPIE Proceedings ; 5504)

20th European conference on mask technology for integrated circuits and microcomponents : 12-14 January 2004 : Dresden, Germany. : European mask conference (EMC) : Jan 2004, Dresden, Germany. (SPIE Proceedings ; 5504)
Paper図書
SPIEc2004.<M17-04-2973>
National Diet LibraryOther Libraries in Japan
  • Author HeadingVDE/VDI. Society Microelectronics, Micro- and Precision Engineering (GMM) Behringer, Uwe. Forschungszen...

16th European conference on mask technology for integrated circuits and microcomponents : Nov 1999, Munich, Germany. (SPIE Proceedings ; 3996)

16th European conference on mask technology for integrated circuits and microcomponents : Nov 1999, Munich, Germany. (SPIE Proceedings ; 3996)
Paper図書
SPIE2000.<M17-00-1144>
National Diet Library
  • Author HeadingVDE/VDI. Society Microelectronics, Micro- and Precision Engineering (GMM) Forschungszentrum Karlsruhe. ...

18th European conference on mask technology for integrated circuits and microcomponents : proceedings : 15-16 January 2002 : Munich, Germany. : 18th European mask conference (EMC) : Jan 2002, Munich, Germany. (SPIE Proceedings ; 4764)

18th European conference on mask technology for integrated circuits and microcomponents : proceedings : 15-16 January 2002 : Munich, Germany. : 18th European mask conference (EMC) : Jan 2002, Munich, Germany. (SPIE Proceedings ; 4764)
Paper図書
SPIEc2002.<M17-03-4558>
National Diet LibraryOther Libraries in Japan
  • Author HeadingVDE/VDI. Society Microelectronics, Micro- and Precision Engineering (GMM) Behringer, Uwe F. W. Forschun...

Mask technology for integrated circuits and microcomponents '98 : 15th European conference : Nov 1998, Munich, Germany. (SPIE Proceedings ; 3665)

Mask technology for integrated circuits and microcomponents '98 : 15th European conference : Nov 1998, Munich, Germany. (SPIE Proceedings ; 3665)
Paper図書
SPIE1999.<M17-99-1225>
National Diet Library
  • Author Heading...l Engineering. VDE/VDI. Society Microelectronics, Micro- and Precision Engineering (GMM) Forschungszentrum Karlsruhe G...

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